Reference Type | Journal (article/letter/editorial) |
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Title | Scale dependence of tensile strength of micromachined polysilicon MEMS structures due to microstructural and dimensional constraints |
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Journal | Chinese Science Bulletin |
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Authors | Ding, Jianning | Author |
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Meng, Yonggang | Author |
Wen, Shizhu | Author |
Year | 2001 (August) | Volume | 46 |
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Issue | 16 |
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Publisher | Springer Science and Business Media LLC |
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DOI | doi:10.1007/bf03183397Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 7101124 | Long-form Identifier | mindat:1:5:7101124:0 |
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GUID | 0 |
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Full Reference | Ding, Jianning, Meng, Yonggang, Wen, Shizhu (2001) Scale dependence of tensile strength of micromachined polysilicon MEMS structures due to microstructural and dimensional constraints. Chinese Science Bulletin, 46 (16). 1392-1397 doi:10.1007/bf03183397 |
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Plain Text | Ding, Jianning, Meng, Yonggang, Wen, Shizhu (2001) Scale dependence of tensile strength of micromachined polysilicon MEMS structures due to microstructural and dimensional constraints. Chinese Science Bulletin, 46 (16). 1392-1397 doi:10.1007/bf03183397 |
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In | (2001, August) Chinese Science Bulletin Vol. 46 (16) Springer Science and Business Media LLC |
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