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Ishiguro, Takashi, Miyamura, Kazumi (2005) Controllability of Mesoscopic Surface Roughness of Sputtered Al and Al–N Films. MATERIALS TRANSACTIONS, 46 (12). 3037-3043 doi:10.2320/matertrans.46.3037

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Reference TypeJournal (article/letter/editorial)
TitleControllability of Mesoscopic Surface Roughness of Sputtered Al and Al–N Films
JournalMATERIALS TRANSACTIONS
AuthorsIshiguro, TakashiAuthor
Miyamura, KazumiAuthor
Year2005Volume46
Issue12
PublisherJapan Institute of Metals
DOIdoi:10.2320/matertrans.46.3037Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID7777955Long-form Identifiermindat:1:5:7777955:9
GUID0
Full ReferenceIshiguro, Takashi, Miyamura, Kazumi (2005) Controllability of Mesoscopic Surface Roughness of Sputtered Al and Al–N Films. MATERIALS TRANSACTIONS, 46 (12). 3037-3043 doi:10.2320/matertrans.46.3037
Plain TextIshiguro, Takashi, Miyamura, Kazumi (2005) Controllability of Mesoscopic Surface Roughness of Sputtered Al and Al–N Films. MATERIALS TRANSACTIONS, 46 (12). 3037-3043 doi:10.2320/matertrans.46.3037
In(2005) MATERIALS TRANSACTIONS Vol. 46 (12) Japan Institute of Metals

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Umezawa, Osamu (2005) Mechanical Properties of Thermomechanical Treated Hyper-Eutectic Al–Si–(Fe,Mn,Cu) Materials. MATERIALS TRANSACTIONS, 46 (12). 2616-2623 doi:10.2320/matertrans.46.2616
Chen, Ding, Takeuchi, Akira, Inoue, Akihisa (2005) Thermal Stability and Magnetic Properties of Fe–Nd–Al Amorphous Alloys. MATERIALS TRANSACTIONS, 46 (12). 2844-2847 doi:10.2320/matertrans.46.2844
Sato, Shigeo, Sanada, Takashi, Saida, Junji, Imafuku, Muneyuki, Matsubara, Eiichiro, Inoue, Akihisa (2005) Effect of Al on Local Structures of Zr–Ni and Zr–Cu Metallic Glasses. MATERIALS TRANSACTIONS, 46 (12). 2893-2897 doi:10.2320/matertrans.46.2893
Saito, Tetsuji (2005) Magnetic Properties of Pr–Fe–Al Alloys Produced by the Metallic Mold Casting Method. MATERIALS TRANSACTIONS, 46 (12). 2940-2944 doi:10.2320/matertrans.46.2940
Ishiguro, Takashi, Sato, Junichi (1994) Electron Microscopy Study of Sputtered Co–Pt Films. Materials Transactions, JIM, 35. 319-324 doi:10.2320/matertrans1989.35.319
Hasegawa, Masashi, Taketomi, Tsuyoshi, Kato, Hidemi, Takeuchi, Tsunehiro, Mizutani, Uichirou, Inoue, Akihisa (2005) Comparative Study on Glassy Phase Stabilities of Zr–Co–Al and Zr–Ni–Al Metallic Glasses. MATERIALS TRANSACTIONS, 46 (12). 2785-2790 doi:10.2320/matertrans.46.2785
Chen, Chia-Hua, Huang, Hsin-Erh (2005) Characteristics of Sputtered Al-Sc and Al-Nd Alloy Thin Films for use in Liquid Crystal Display. MATERIALS TRANSACTIONS, 46 (6). 1413-1416 doi:10.2320/matertrans.46.1413
Yoshitake, Michiko, Yamauchi, Yasuhiro, Song, Weijie (2005) Oxidation of Pd–Al(111) Epitaxial Films in Ultra-High Vacuum. MATERIALS TRANSACTIONS, 46 (6). 1331-1334 doi:10.2320/matertrans.46.1331
Kubota, Masahiro, Muddle, Barry C. (2005) Effect of Trace Additions of Ag on Precipitation in Al–Mg Alloys. MATERIALS TRANSACTIONS, 46 (12). 2968-2974 doi:10.2320/matertrans.46.2968
Chino, Yasumasa, Jae-Seol, Lee, Nakaura, Yusuke, Ohori, Koichi, Mabuchi, Mamoru (2005) Mechanical Properties of Mg–Al–Ca Alloy Recycled by Solid–State Recycling. MATERIALS TRANSACTIONS, 46 (12). 2592-2595 doi:10.2320/matertrans.46.2592
Nishimura, Masato, Ishiguro, Takashi (2003) Structural-Color-Control by AlN Coating on Rough-Surface Al Film. MATERIALS TRANSACTIONS, 44 (11). 2417-2419 doi:10.2320/matertrans.44.2417
 
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