Fukuda, Yasuyuki, Saotome, Yasunori, Kimura, Hisamichi, Inoue, Akihisa (2011) Nanoimprinting of Metallic Glass for Periodic Nano-Hole Structures with Dies Fabricated by FIB-CVD and RIE. MATERIALS TRANSACTIONS, 52 (2). 239-242 doi:10.2320/matertrans.m2010241
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Nanoimprinting of Metallic Glass for Periodic Nano-Hole Structures with Dies Fabricated by FIB-CVD and RIE | ||
Journal | MATERIALS TRANSACTIONS | ||
Authors | Fukuda, Yasuyuki | Author | |
Saotome, Yasunori | Author | ||
Kimura, Hisamichi | Author | ||
Inoue, Akihisa | Author | ||
Year | 2011 | Volume | 52 |
Issue | 2 | ||
Publisher | Japan Institute of Metals | ||
DOI | doi:10.2320/matertrans.m2010241Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 7780975 | Long-form Identifier | mindat:1:5:7780975:3 |
GUID | 0 | ||
Full Reference | Fukuda, Yasuyuki, Saotome, Yasunori, Kimura, Hisamichi, Inoue, Akihisa (2011) Nanoimprinting of Metallic Glass for Periodic Nano-Hole Structures with Dies Fabricated by FIB-CVD and RIE. MATERIALS TRANSACTIONS, 52 (2). 239-242 doi:10.2320/matertrans.m2010241 | ||
Plain Text | Fukuda, Yasuyuki, Saotome, Yasunori, Kimura, Hisamichi, Inoue, Akihisa (2011) Nanoimprinting of Metallic Glass for Periodic Nano-Hole Structures with Dies Fabricated by FIB-CVD and RIE. MATERIALS TRANSACTIONS, 52 (2). 239-242 doi:10.2320/matertrans.m2010241 | ||
In | (2011) MATERIALS TRANSACTIONS Vol. 52 (2) Japan Institute of Metals |
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