Ortega, Luc, Comin, Fabio, Formoso, Vincenzo, Stierle, Andreas (1998) Trace element analysis on Si wafer surfaces by TXRF at the ID32 ESRF undulator beamline. Journal of Synchrotron Radiation, 5 (3). 1064-1066 doi:10.1107/s0909049597016737
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Trace element analysis on Si wafer surfaces by TXRF at the ID32 ESRF undulator beamline | ||
Journal | Journal of Synchrotron Radiation | ||
Authors | Ortega, Luc | Author | |
Comin, Fabio | Author | ||
Formoso, Vincenzo | Author | ||
Stierle, Andreas | Author | ||
Year | 1998 (May 1) | Volume | 5 |
Issue | 3 | ||
Publisher | International Union of Crystallography (IUCr) | ||
DOI | doi:10.1107/s0909049597016737Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8482372 | Long-form Identifier | mindat:1:5:8482372:4 |
GUID | 0 | ||
Full Reference | Ortega, Luc, Comin, Fabio, Formoso, Vincenzo, Stierle, Andreas (1998) Trace element analysis on Si wafer surfaces by TXRF at the ID32 ESRF undulator beamline. Journal of Synchrotron Radiation, 5 (3). 1064-1066 doi:10.1107/s0909049597016737 | ||
Plain Text | Ortega, Luc, Comin, Fabio, Formoso, Vincenzo, Stierle, Andreas (1998) Trace element analysis on Si wafer surfaces by TXRF at the ID32 ESRF undulator beamline. Journal of Synchrotron Radiation, 5 (3). 1064-1066 doi:10.1107/s0909049597016737 | ||
In | (1998, May) Journal of Synchrotron Radiation Vol. 5 (3) International Union of Crystallography (IUCr) |
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