Boswell, R. W., Morey, I. J. (1988) Self‐consistent simulation of a parallel‐plate rf discharge. Applied Physics Letters, 52 (1). 21-23 doi:10.1063/1.99327
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Self‐consistent simulation of a parallel‐plate rf discharge | ||
| Journal | Applied Physics Letters | ||
| Authors | Boswell, R. W. | Author | |
| Morey, I. J. | Author | ||
| Year | 1988 (January 4) | Volume | 52 |
| Issue | 1 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.99327Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 8482403 | Long-form Identifier | mindat:1:5:8482403:3 |
| GUID | 0 | ||
| Full Reference | Boswell, R. W., Morey, I. J. (1988) Self‐consistent simulation of a parallel‐plate rf discharge. Applied Physics Letters, 52 (1). 21-23 doi:10.1063/1.99327 | ||
| Plain Text | Boswell, R. W., Morey, I. J. (1988) Self‐consistent simulation of a parallel‐plate rf discharge. Applied Physics Letters, 52 (1). 21-23 doi:10.1063/1.99327 | ||
| In | (1988, January) Applied Physics Letters Vol. 52 (1) AIP Publishing | ||
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