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Nii, H., Niibe, M., Kinoshita, H., Sugie, Y. (1998) Fabrication of Mo/Al multilayer films for a wavelength of 18.5 nm. Journal of Synchrotron Radiation, 5 (3). 702-704 doi:10.1107/s0909049597019407

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Reference TypeJournal (article/letter/editorial)
TitleFabrication of Mo/Al multilayer films for a wavelength of 18.5 nm
JournalJournal of Synchrotron Radiation
AuthorsNii, H.Author
Niibe, M.Author
Kinoshita, H.Author
Sugie, Y.Author
Year1998 (May 1)Volume5
Issue3
PublisherInternational Union of Crystallography (IUCr)
DOIdoi:10.1107/s0909049597019407Search in ResearchGate
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Mindat Ref. ID8482582Long-form Identifiermindat:1:5:8482582:9
GUID0
Full ReferenceNii, H., Niibe, M., Kinoshita, H., Sugie, Y. (1998) Fabrication of Mo/Al multilayer films for a wavelength of 18.5 nm. Journal of Synchrotron Radiation, 5 (3). 702-704 doi:10.1107/s0909049597019407
Plain TextNii, H., Niibe, M., Kinoshita, H., Sugie, Y. (1998) Fabrication of Mo/Al multilayer films for a wavelength of 18.5 nm. Journal of Synchrotron Radiation, 5 (3). 702-704 doi:10.1107/s0909049597019407
In(1998, May) Journal of Synchrotron Radiation Vol. 5 (3) International Union of Crystallography (IUCr)

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Kinoshita, Hiroo, Watanabe, Takeo, Niibe, Masato (1998) Synchrotron Radiation Lithography for Manufacturing Integrated Circuits Beyond 100 nm. Journal of Synchrotron Radiation, 5 (3). 320-325 doi:10.1107/s0909049597017615
Nii, Hajime, Miyagawa, Makoto, Matsuo, Yoshiaki, Sugie, Yosohiro, Niibe, Masato, Kinoshita, Hiroo (2002) Control of Roughness in Mo/Al Multilayer Film Fabricated by DC Magnetron Sputtering. Japanese Journal of Applied Physics, 41. 5338-5341 doi:10.1143/jjap.41.5338
Watanabe, Takeo, Haga, Tsuneyuki, Niibe, Masahito, Kinoshita, Hiroo (1998) Design of beamline optics for EUVL. Journal of Synchrotron Radiation, 5 (3). 1149-1152 doi:10.1107/s0909049597017536
Niibe, Masahito, Nii, Hajime, Sugie, Yosohiro (2002) Stress Changes and Stability of Sputter-Deposited Mo/B4C Multilayer Films for Extreme Ultraviolet Mirrors. Japanese Journal of Applied Physics, 41. 3069-3075 doi:10.1143/jjap.41.3069
Koike, M., Suzuki, I. H., Komiya, S., Amemiya, Y. (1998) Ti/Al multilayer zone plate and Bragg–Fresnel lens. Journal of Synchrotron Radiation, 5 (3). 794-796 doi:10.1107/s090904959701666x
Ando, A., Amano, S., Hashimoto, S., Kinosita, H., Miyamoto, S., Mochizuki, T., Niibe, M., Shoji, Y., Terasawa, M., Watanabe, T., Kumagai, N. (1998) Isochronous storage ring of the New SUBARU project. Journal of Synchrotron Radiation, 5 (3). 342-344 doi:10.1107/s0909049597013150
Kamada, M., Hama, H., Kinoshita, T., Kosugi, N. (1998) Present Status of the UVSOR Facility – 1997. Journal of Synchrotron Radiation, 5 (3). 1166-1169 doi:10.1107/s0909049597018311
Yamashita, K., Akiyama, K., Haga, K., Kunieda, H., Lodha, G. S., Nakajo, N., Nakamura, N., Okajima, T., Tamura, K., Tawara, Y. (1998) Fabrication and characterization of multilayer supermirrors for hard X-ray optics. Journal of Synchrotron Radiation, 5 (3). 711-713 doi:10.1107/s0909049597019419
Takenaka, Hisataka, Ito, Hisashi, Haga, Tsuneyuki, Kawamura, Tomoaki (1998) Design and fabrication of highly heat-resistant Mo/Si multilayer soft X-ray mirrors with interleaved barrier layers. Journal of Synchrotron Radiation, 5 (3). 708-710 doi:10.1107/s0909049598000491
Kawata, H., Sato, M., Higashi, Y., Yamaoka, H. (1998) A new water-cooled and doubly bent crystal monochromator for Compton scattering experiments. Journal of Synchrotron Radiation, 5 (3). 673-675 doi:10.1107/s0909049597020268
Iwai, H., Namba, H., Kido, Y., Taguchi, M., Oiwa, R. (1998) Improvement of spectrometer energy resolution for high-resolution photoelectron spectroscopy. Journal of Synchrotron Radiation, 5 (3). 1020-1022 doi:10.1107/s0909049597019262
 
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