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Khan Malek, C., Das, S. (2003) Swelling behaviour of poly(methylmethacrylate) thick resist layers in deep X-ray lithography. Journal of Synchrotron Radiation, 10 (3). 272-279 doi:10.1107/s0909049503005971

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Reference TypeJournal (article/letter/editorial)
TitleSwelling behaviour of poly(methylmethacrylate) thick resist layers in deep X-ray lithography
JournalJournal of Synchrotron Radiation
AuthorsKhan Malek, C.Author
Das, S.Author
Year2003 (May 1)Volume10
Issue3
PublisherInternational Union of Crystallography (IUCr)
DOIdoi:10.1107/s0909049503005971Search in ResearchGate
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Mindat Ref. ID8484684Long-form Identifiermindat:1:5:8484684:0
GUID0
Full ReferenceKhan Malek, C., Das, S. (2003) Swelling behaviour of poly(methylmethacrylate) thick resist layers in deep X-ray lithography. Journal of Synchrotron Radiation, 10 (3). 272-279 doi:10.1107/s0909049503005971
Plain TextKhan Malek, C., Das, S. (2003) Swelling behaviour of poly(methylmethacrylate) thick resist layers in deep X-ray lithography. Journal of Synchrotron Radiation, 10 (3). 272-279 doi:10.1107/s0909049503005971
In(2003, May) Journal of Synchrotron Radiation Vol. 10 (3) International Union of Crystallography (IUCr)

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Khan Malek, C., Saile, V., Manohara, H., Craft, B. (1998) Deep X-ray lithography with a tunable wavelength shifter at CAMD. Journal of Synchrotron Radiation, 5 (3). 1095-1098 doi:10.1107/s0909049597019547
Achenbach, Sven, Wells, Garth, Shen, Chen (2018) Characterization of the surface contamination of deep X-ray lithography mirrors exposed to synchrotron radiation. Journal of Synchrotron Radiation, 25 (3). 729-737 doi:10.1107/s1600577518004939
Utsumi, Yuichi, Takahashi, Jun-ichi, Hosokawa, Teruo (1998) Synchrotron-radiation-induced formation of salt particles on an X-ray lithography mask. Journal of Synchrotron Radiation, 5 (3). 1141-1143 doi:10.1107/s0909049597017603
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Naz’mov, V. P. (2019) Deep 3D X-ray Lithography Based on High-Contrast Resist Layers. Technical Physics Letters, 45. 906-908 doi:10.1134/s1063785019090256
Malgrange, C., Graeff, W. (2003) Diffraction of short X-ray pulses in the general asymmetric Laue case – an analytic treatment. Journal of Synchrotron Radiation, 10 (3). 248-254 doi:10.1107/s0909049503005594
Kishimoto, Shunji (1998) Avalanche Photodiodes as Fast X-ray Detectors. Journal of Synchrotron Radiation, 5 (3). 275-279 doi:10.1107/s0909049598000053
Ascone, Isabella, Fourme, Roger, Hasnain, S. Samar (2003) Introductory overview: X-ray absorption spectroscopy and structural genomics. Journal of Synchrotron Radiation, 10 (1). 1-3 doi:10.1107/s0909049502022434
Alianelli, Lucia, Sanchez del Rio, Manuel, Khan, Mumit, Cerrina, Franco (2003) A comment on `A new ray-tracing programRIGTRACEfor X-ray optical systems' [J. Synchrotron Rad.(2001),8, 1047–1050]. Journal of Synchrotron Radiation, 10 (2). 191-192 doi:10.1107/s090904950202352x
Morelhão, Sérgio L. (2003) An X-ray diffractometer for accurate structural invariant phase determination. Journal of Synchrotron Radiation, 10 (3). 236-241 doi:10.1107/s0909049503003789
 
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