Vote for your favorite mineral in #MinCup25! - Zunyite vs. Molybdenite
It's the visually-unmistakable #zunyite vs the physically funky #molybdenite.
Log InRegister
Quick Links : The Mindat ManualThe Rock H. Currier Digital LibraryMindat Newsletter [Free Download]
Home PageAbout MindatThe Mindat ManualHistory of MindatCopyright StatusWho We AreContact UsAdvertise on Mindat
Donate to MindatCorporate SponsorshipSponsor a PageSponsored PagesMindat AdvertisersAdvertise on Mindat
Learning CenterWhat is a mineral?The most common minerals on earthInformation for EducatorsMindat ArticlesThe ElementsThe Rock H. Currier Digital LibraryGeologic Time
Minerals by PropertiesMinerals by ChemistryAdvanced Locality SearchRandom MineralRandom LocalitySearch by minIDLocalities Near MeSearch ArticlesSearch GlossaryMore Search Options
Search For:
Mineral Name:
Locality Name:
Keyword(s):
 
The Mindat ManualAdd a New PhotoRate PhotosLocality Edit ReportCoordinate Completion ReportAdd Glossary Item
Mining CompaniesStatisticsUsersMineral MuseumsClubs & OrganizationsMineral Shows & EventsThe Mindat DirectoryDevice SettingsThe Mineral Quiz
Photo SearchPhoto GalleriesSearch by ColorNew Photos TodayNew Photos YesterdayMembers' Photo GalleriesPast Photo of the Day GalleryPhotography

Ong, T. P., Fiordalice, R., Venkatraman, R., Garcia, S., Jain, A., Sparks, T., Farkas, J., Fernandes, M., Gall, M., Jawarani, D., Klein, J., Weitzman, E., Kawasaki, H., Wu, Wei, Blumenthal, R., Pintchovski, F., Marsh, R., Zhang, P., Zhang, H., Guo, T., Mosely, R. (1998) Void-free chemically vapor-deposited aluminum dual inlaid metallization schemes for ultra-large-scale-integrated via and interconnect applications. Applied Physics Letters, 73 (1). 82-84 doi:10.1063/1.121731

Advanced
   -   Only viewable:
Reference TypeJournal (article/letter/editorial)
TitleVoid-free chemically vapor-deposited aluminum dual inlaid metallization schemes for ultra-large-scale-integrated via and interconnect applications
JournalApplied Physics Letters
AuthorsOng, T. P.Author
Fiordalice, R.Author
Venkatraman, R.Author
Garcia, S.Author
Jain, A.Author
Sparks, T.Author
Farkas, J.Author
Fernandes, M.Author
Gall, M.Author
Jawarani, D.Author
Klein, J.Author
Weitzman, E.Author
Kawasaki, H.Author
Wu, WeiAuthor
Blumenthal, R.Author
Pintchovski, F.Author
Marsh, R.Author
Zhang, P.Author
Zhang, H.Author
Guo, T.Author
Mosely, R.Author
Year1998 (July 6)Volume73
Issue1
PublisherAIP Publishing
DOIdoi:10.1063/1.121731Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID8521726Long-form Identifiermindat:1:5:8521726:7
GUID0
Full ReferenceOng, T. P., Fiordalice, R., Venkatraman, R., Garcia, S., Jain, A., Sparks, T., Farkas, J., Fernandes, M., Gall, M., Jawarani, D., Klein, J., Weitzman, E., Kawasaki, H., Wu, Wei, Blumenthal, R., Pintchovski, F., Marsh, R., Zhang, P., Zhang, H., Guo, T., Mosely, R. (1998) Void-free chemically vapor-deposited aluminum dual inlaid metallization schemes for ultra-large-scale-integrated via and interconnect applications. Applied Physics Letters, 73 (1). 82-84 doi:10.1063/1.121731
Plain TextOng, T. P., Fiordalice, R., Venkatraman, R., Garcia, S., Jain, A., Sparks, T., Farkas, J., Fernandes, M., Gall, M., Jawarani, D., Klein, J., Weitzman, E., Kawasaki, H., Wu, Wei, Blumenthal, R., Pintchovski, F., Marsh, R., Zhang, P., Zhang, H., Guo, T., Mosely, R. (1998) Void-free chemically vapor-deposited aluminum dual inlaid metallization schemes for ultra-large-scale-integrated via and interconnect applications. Applied Physics Letters, 73 (1). 82-84 doi:10.1063/1.121731
In(1998, July) Applied Physics Letters Vol. 73 (1) AIP Publishing

See Also

These are possibly similar items as determined by title/reference text matching only.

Gall, M., Capasso, C., Jawarani, D., Hernandez, R., Kawasaki, H., Ho, P. S. (2000) Detection and analysis of early failures in electromigration. Applied Physics Letters, 76 (7). 843-845 doi:10.1063/1.125603
Holm, R. T., Klein, P. H., Nordquist, P. E. R. (1986) Infrared reflectance evaluation of chemically vapor deposited β‐SiC films grown on Si substrates. Journal of Applied Physics, 60 (4). 1479-1485 doi:10.1063/1.337275
Gall, M., Capasso, C., Jawarani, D., Hernandez, R., Kawasaki, H., Ho, P. S. (2001) Statistical analysis of early failures in electromigration. Journal of Applied Physics, 90 (2). 732-740 doi:10.1063/1.1377304
Kottke, M., Pintchovski, F., White, T. R., Tobin, P. J. (1986) Redistribution of excess Si in chemical vapor deposited WSixfilms upon post‐deposition annealing. Journal of Applied Physics, 60 (8). 2835-2841 doi:10.1063/1.337067
Kress, W. J., Heyer, W. R., Acevedo, P., Coddington, J., Cole, D., Erwin, T. L., Meggers, B. J., Pogue, M., Thorington, R. W., Vari, R. P., Weitzman, M. J., Weitzman, S. H. (1998) Amazonian biodiversity: assessing conservation priorities with taxonomic data. Biodiversity and Conservation, 7 (12) 1577-1587 doi:10.1023/a:1008889803319
Wong, M. S., Meilunas, R., Ong, T. P., Chang, R. P. H. (1989) Tribological properties of diamond films grown by plasma‐enhanced chemical vapor deposition. Applied Physics Letters, 54 (20). 2006-2008 doi:10.1063/1.101197
Cao, H., Zhao, Y. G., Ong, H. C., Ho, S. T., Dai, J. Y., Wu, J. Y., Chang, R. P. H. (1998) Ultraviolet lasing in resonators formed by scattering in semiconductor polycrystalline films. Applied Physics Letters, 73 (25). 3656-3658 doi:10.1063/1.122853
Cinabro, D., Henderson, S., Kinoshita, K., Liu, T., Saulnier, M., Wilson, R., Yamamoto, H., Sadoff, A. J., Ammar, R., Ball, S., Baringer, P., Coppage, D., Copty, N., Davis, R., Hancock, N., Kelly, M., Kwak, N., Lam, H., Kubota, Y., Lattery, M., Nelson, J. K., Patton, S., Perticone, D., Poling, R., Savinov, V., Schrenk, S., Wang, R., Alam, M. S., Kim, I. J., Nemati, B., O’Neill, J. J., Romero, V., Severini, H., Sun, C. R., Zoeller, M. M., Crawford, G., Fulton, R., Fujino, D., Gan, K. K., Kagan, H., Kass, R., Lee, J., Malchow, R., Morrow, F., Skovpen, Y., Sung, M., White, C., Whitmore, J., Wilson, P., Butler, F., Fu, X., Kalbfleisch, G., Lambrecht, M., Ross, W. R., Skubic, P., Snow, J., Wang, P. L., Wood, M., Bortoletto, D., Brown, D. N., Dominick, J., McIlwain, R. L., Miao, T., Miller, D. H., Modesitt, M., Schaffner, S. F., Shibata, E. I., Shipsey, I. P. J., Wang, P. N., Battle, M., Ernst, J., Kroha, H., Roberts, S., Sparks, K., Thorndike, E. H., Wang, C. H., Sanghera, S., Skwarnicki, T., Stroynowski, R., Artuso, M., He, D., Goldberg, M., Horwitz, N., Kennett, R., Moneti, G. C., Muheim, F., Mukhin, Y., Playfer, S., Rozen, Y., Rubin, P., Stone, S., Thulasidas, M., Vasseur, G., Zhu, G., Barnes, A. V., Bartelt, J., Csorna, S. E., Egyed, Z., Jain, V., Sheldon, P., Akerib, D. S., Barish, B., Chadha, M., Chan, S., Cowen, D. F., Eigen, G., Miller, J. S., Urheim, J., Weinstein, A. J., Acosta, D., Athanas, M., Masek, G., Ong, B., Paar, H., Sivertz, M., Bean, A., Gronberg, J., Kutschke, R., Menary, S., Morrison, R. J., Nakanishi, S., Nelson, H. N., Nelson, T. K., Richman, J. D., Tajima, H., Schmidt, D., Sperka, D., Witherell, M. S., Procario, M., Yang, S., Balest, R., Cho, K., Daoudi, M., Ford, W. T., Johnson, D. R., Lingel, K., Lohner, M., Rankin, P., Smith, J. G., Alexander, J. P., Bebek, C., Berkelman, K., Besson, D., Browder, T. E., Cassel, D. G., Cho, H. A., Coffman, D. M., Drell, P. S., Ehrlich, R., Galik, R. S., Garcia-Sciveres, M., Geiser, B., Gittelman, B., Gray, S. W
Alam, M. S., Kim, I. J., Nemati, B., O'Neill, J. J., Romero, V., Severini, H., Sun, C. R., Wang, P. -N., Zoeller, M. M., Crawford, G., Fulton, R., Gan, K. K., Kagan, H., Kass, R., Lee, J., Malchow, R., Morrow, F., Sung, M., White, C., Whitmore, J., Wilson, P., Butler, F., Fu, X., Kalbfleisch, G., Lambrecht, M., Skubic, P., Snow, J., Wang, P. -L., Bortoletto, D., Brown, D. N., Dominick, J., McIlwain, R. L., Miao, T., Miller, D. H., Modesitt, M., Schaffner, S. F., Shibata, E. I., Shipsey, I. P. J., Battle, M., Ernst, J., Kroha, H., Roberts, S., Sparks, K., Thorndike, E. H., Wang, C. -H., Artuso, M., Goldberg, M., Haupt, T., Horwitz, N., Kennett, R., Moneti, G. C., Playfer, S., Rozen, Y., Rubin, P., Skwarnicki, T., Stone, S., Thulasidas, M., Yao, W. -M., Zhu, G., Stroynowski, R., Barnes, A. V., Bartelt, J., Csorna, S. E., Egyed, Z., Jain, V., Letson, T., Mestayer, M. D., Sheldon, P., Akerib, D. S., Barish, B., Chadha, M., Cowen, D. F., Eigen, G., Miller, J. S., Urheim, J., Weinstein, A. J., Menary, S., Morrison, R. J., Nelson, H. N., Richman, J., Tajima, H., Schmidt, D., Sperka, D., Witherell, M., Acosta, D., Masek, G., Ong, B., Paar, H., Sivertz, M., Procario, M., Daoudi, M., Ford, W. T., Johnson, D. R., Lingel, K., Lohner, M., Rankin, P., Smith, J. G., Alexander, J., Bebek, C., Berkelman, K., Besson, D., Browder, T. E., Cassel, D. G., Cheu, E. C., Coffman, D. M., Drell, P. S., Ehrlich, R., Garcia-Sciveres, M., Geiser, B., Gittelman, B., Gray, S. W., Hartill, D. L., Heltsley, B. K., Honscheid, K., Jones, C., Kandaswamy, J., Katayama, N., Kim, P. C., Kreinick, D. L., Ludwig, G. S., Masui, J., Mevissen, J., Mistry, N. B., Nandi, S., Ng, C. R., Nordberg, E., O'Grady, C., Patterson, J. R., Peterson, D., Riley, D., Sapper, M., Selen, M., Worden, H., Worris, M., Würthwein, F., Avery, P., Freyberger, A., Rodriguez, J., Stephens, R., Yelton, J., Henderson, S., Kinoshita, K., Liu, T., Saulnier, M., Wilson, R., Yamamoto, H., Sadoff, A. J., Ammar, R., Ball, S., Baringer, P., Cop
Aguilar-Arevalo, A. A., Bazarko, A. O., Brice, S. J., Brown, B. C., Bugel, L., Cao, J., Coney, L., Conrad, J. M., Cox, D. C., Curioni, A., Djurcic, Z., Finley, D. A., Fleming, B. T., Ford, R., Garcia, F. G., Garvey, G. T., Green, C., Green, J. A., Hart, T. L., Hawker, E., Imlay, R., Johnson, R. A., Kasper, P., Katori, T., Kobilarcik, T., Kourbanis, I., Koutsoliotas, S., Laird, E. M., Link, J. M., Liu, Y., Liu, Y., Louis, W. C., Mahn, K. B. M., Marsh, W., Martin, P. S., McGregor, G., Metcalf, W., Meyers, P. D., Mills, F., Mills, G. B., Monroe, J., Moore, C. D., Nelson, R. H., Nienaber, P., Ouedraogo, S., Patterson, R. B., Perevalov, D., Polly, C. C., Prebys, E., Raaf, J. L., Ray, H., Roe, B. P., Russell, A. D., Sandberg, V., Schirato, R., Schmitz, D., Shaevitz, M. H., Shoemaker, F. C., Smith, D., Sorel, M., Spentzouris, P., Stancu, I., Stefanski, R. J., Sung, M., Tanaka, H. A., Tayloe, R., Tzanov, M., Van de Water, R., Wascko, M. O., White, D. H., Wilking, M. J., Yang, H. J., Zeller, G. P., Zimmerman, E. D. (2007) Search for Electron Neutrino Appearance at theΔm2∼1  eV2Scale. Physical Review Letters, 98 (23). doi:10.1103/physrevlett.98.231801
Formaggio, J. A., Zimmerman, E. D., Adams, T., Alton, A., Avvakumov, S., de Barbaro, L., de Barbaro, P., Bernstein, R. H., Bodek, A., Bolton, T., Brau, J., Buchholz, D., Budd, H., Bugel, L., Case, S., Conrad, J. M., Drucker, R. B., Fleming, B. T., Frey, R., Goldman, J., Goncharov, M., Harris, D. A., Johnson, R. A., Kim, J. H., Koutsoliotas, S., Lamm, M. J., Marsh, W., Mason, D., McFarland, K. S., McNulty, C., Naples, D., Nienaber, P., Romosan, A., Sakumoto, W. K., Schellman, H. M., Shaevitz, M. H., Spentzouris, P., Stern, E. G., Vakili, M., Vaitaitis, A., Wu, V., Yang, U. K., Yu, J., Zeller, G. P. (2000) Search for a33.9MeV/c2Neutral Particle in Pion Decay. Physical Review Letters, 84 (18). 4043-4046 doi:10.1103/physrevlett.84.4043
 
and/or  
Mindat.org is an outreach project of the Hudson Institute of Mineralogy, a 501(c)(3) not-for-profit organization.
Copyright © mindat.org and the Hudson Institute of Mineralogy 1993-2025, except where stated. Most political location boundaries are © OpenStreetMap contributors. Mindat.org relies on the contributions of thousands of members and supporters. Founded in 2000 by Jolyon Ralph.
To cite: Ralph, J., Von Bargen, D., Martynov, P., Zhang, J., Que, X., Prabhu, A., Morrison, S. M., Li, W., Chen, W., & Ma, X. (2025). Mindat.org: The open access mineralogy database to accelerate data-intensive geoscience research. American Mineralogist, 110(6), 833–844. doi:10.2138/am-2024-9486.
Privacy Policy - Terms & Conditions - Contact Us / DMCA issues - Report a bug/vulnerability Current server date and time: September 12, 2025 10:51:42
Go to top of page