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Minne, S. C., Adams, J. D., Yaralioglu, G., Manalis, S. R., Atalar, A., Quate, C. F. (1998) Centimeter scale atomic force microscope imaging and lithography. Applied Physics Letters, 73 (12). 1742-1744 doi:10.1063/1.122263

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Reference TypeJournal (article/letter/editorial)
TitleCentimeter scale atomic force microscope imaging and lithography
JournalApplied Physics Letters
AuthorsMinne, S. C.Author
Adams, J. D.Author
Yaralioglu, G.Author
Manalis, S. R.Author
Atalar, A.Author
Quate, C. F.Author
Year1998 (September 21)Volume73
Issue12
PublisherAIP Publishing
DOIdoi:10.1063/1.122263Search in ResearchGate
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Mindat Ref. ID8521883Long-form Identifiermindat:1:5:8521883:1
GUID0
Full ReferenceMinne, S. C., Adams, J. D., Yaralioglu, G., Manalis, S. R., Atalar, A., Quate, C. F. (1998) Centimeter scale atomic force microscope imaging and lithography. Applied Physics Letters, 73 (12). 1742-1744 doi:10.1063/1.122263
Plain TextMinne, S. C., Adams, J. D., Yaralioglu, G., Manalis, S. R., Atalar, A., Quate, C. F. (1998) Centimeter scale atomic force microscope imaging and lithography. Applied Physics Letters, 73 (12). 1742-1744 doi:10.1063/1.122263
In(1998, September) Applied Physics Letters Vol. 73 (12) AIP Publishing

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Minne, S. C., Yaralioglu, G., Manalis, S. R., Adams, J. D., Zesch, J., Atalar, A., Quate, C. F. (1998) Automated parallel high-speed atomic force microscopy. Applied Physics Letters, 72 (18). 2340-2342 doi:10.1063/1.121353
Sulchek, T., Grow, R. J., Yaralioglu, G. G., Minne, S. C., Quate, C. F., Manalis, S. R., Kiraz, A., Aydine, A., Atalar, A. (2001) Parallel atomic force microscopy with optical interferometric detection. Applied Physics Letters, 78 (12). 1787-1789 doi:10.1063/1.1352697
Manalis, S. R., Minne, S. C., Atalar, A., Quate, C. F. (1996) Interdigital cantilevers for atomic force microscopy. Applied Physics Letters, 69 (25). 3944-3946 doi:10.1063/1.117578
Minne, S. C., Manalis, S. R., Atalar, A., Quate, C. F. (1996) Contact imaging in the atomic force microscope using a higher order flexural mode combined with a new sensor. Applied Physics Letters, 68 (10). 1427-1429 doi:10.1063/1.116102
Sulchek, T., Hsieh, R., Adams, J. D., Yaralioglu, G. G., Minne, S. C., Quate, C. F., Cleveland, J. P., Atalar, A., Adderton, D. M. (2000) High-speed tapping mode imaging with active Q control for atomic force microscopy. Applied Physics Letters, 76 (11). 1473-1475 doi:10.1063/1.126071
Manalis, S. R., Minne, S. C., Quate, C. F., Yaralioglu, G. G., Atalar, A. (1997) Two-dimensional micromechanical bimorph arrays for detection of thermal radiation. Applied Physics Letters, 70 (24). 3311-3313 doi:10.1063/1.119147
Yaralioglu, G. G., Atalar, A., Manalis, S. R., Quate, C. F. (1998) Analysis and design of an interdigital cantilever as a displacement sensor. Journal of Applied Physics, 83 (12). 7405-7415 doi:10.1063/1.367984
Crozier, K. B., Yaralioglu, G. G., Degertekin, F. L., Adams, J. D., Minne, S. C., Quate, C. F. (2000) Thin film characterization by atomic force microscopy at ultrasonic frequencies. Applied Physics Letters, 76 (14). 1950-1952 doi:10.1063/1.126222
Manalis, S. R., Minne, S. C., Quate, C. F. (1996) Atomic force microscopy for high speed imaging using cantilevers with an integrated actuator and sensor. Applied Physics Letters, 68 (6). 871-873 doi:10.1063/1.116528
Sulchek, T., Minne, S. C., Adams, J. D., Fletcher, D. A., Atalar, A., Quate, C. F., Adderton, D. M. (1999) Dual integrated actuators for extended range high speed atomic force microscopy. Applied Physics Letters, 75 (11). 1637-1639 doi:10.1063/1.124779
Manalis, S. R., Minne, S. C., Atalar, A., Quate, C. F. (1996) High‐speed atomic force microscopy using an integrated actuator and optical lever detection. Review of Scientific Instruments, 67 (9). 3294-3297 doi:10.1063/1.1147410
 
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