Pellegrino, P., Lévêque, P., Kortegaard-Nielsen, H., Wong-Leung, J., Jagadish, C., Svensson, B. G. (2002) Response to “Comment on ‘Separation of vacancy and interstitial depth profiles in ion-implanted silicon: Experimental observation’ ” [Appl. Phys. Lett. 80, 1492 (2002)]. Applied Physics Letters, 80 (8). 1494-1495 doi:10.1063/1.1455141
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Response to “Comment on ‘Separation of vacancy and interstitial depth profiles in ion-implanted silicon: Experimental observation’ ” [Appl. Phys. Lett. 80, 1492 (2002)] | ||
Journal | Applied Physics Letters | ||
Authors | Pellegrino, P. | Author | |
Lévêque, P. | Author | ||
Kortegaard-Nielsen, H. | Author | ||
Wong-Leung, J. | Author | ||
Jagadish, C. | Author | ||
Svensson, B. G. | Author | ||
Year | 2002 (February 25) | Volume | 80 |
Issue | 8 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.1455141Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8532785 | Long-form Identifier | mindat:1:5:8532785:6 |
GUID | 0 | ||
Full Reference | Pellegrino, P., Lévêque, P., Kortegaard-Nielsen, H., Wong-Leung, J., Jagadish, C., Svensson, B. G. (2002) Response to “Comment on ‘Separation of vacancy and interstitial depth profiles in ion-implanted silicon: Experimental observation’ ” [Appl. Phys. Lett. 80, 1492 (2002)]. Applied Physics Letters, 80 (8). 1494-1495 doi:10.1063/1.1455141 | ||
Plain Text | Pellegrino, P., Lévêque, P., Kortegaard-Nielsen, H., Wong-Leung, J., Jagadish, C., Svensson, B. G. (2002) Response to “Comment on ‘Separation of vacancy and interstitial depth profiles in ion-implanted silicon: Experimental observation’ ” [Appl. Phys. Lett. 80, 1492 (2002)]. Applied Physics Letters, 80 (8). 1494-1495 doi:10.1063/1.1455141 | ||
In | (2002, February) Applied Physics Letters Vol. 80 (8) AIP Publishing |
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