Stievater, T. H., Rabinovich, W. S., Newman, H. S., Mahon, R., Goetz, P. G., Ebel, J. L., McGee, D. J. (2002) Measurement of thermal-mechanical noise in microelectromechanical systems. Applied Physics Letters, 81 (10). 1779-1781 doi:10.1063/1.1505122
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Measurement of thermal-mechanical noise in microelectromechanical systems | ||
Journal | Applied Physics Letters | ||
Authors | Stievater, T. H. | Author | |
Rabinovich, W. S. | Author | ||
Newman, H. S. | Author | ||
Mahon, R. | Author | ||
Goetz, P. G. | Author | ||
Ebel, J. L. | Author | ||
McGee, D. J. | Author | ||
Year | 2002 (September 2) | Volume | 81 |
Issue | 10 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.1505122Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8532956 | Long-form Identifier | mindat:1:5:8532956:2 |
GUID | 0 | ||
Full Reference | Stievater, T. H., Rabinovich, W. S., Newman, H. S., Mahon, R., Goetz, P. G., Ebel, J. L., McGee, D. J. (2002) Measurement of thermal-mechanical noise in microelectromechanical systems. Applied Physics Letters, 81 (10). 1779-1781 doi:10.1063/1.1505122 | ||
Plain Text | Stievater, T. H., Rabinovich, W. S., Newman, H. S., Mahon, R., Goetz, P. G., Ebel, J. L., McGee, D. J. (2002) Measurement of thermal-mechanical noise in microelectromechanical systems. Applied Physics Letters, 81 (10). 1779-1781 doi:10.1063/1.1505122 | ||
In | (2002, September) Applied Physics Letters Vol. 81 (10) AIP Publishing |
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