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Ahn, S. K., You, S. J., Chang, H. Y. (2006) Driving frequency effect on the electron energy distribution function in capacitive discharge under constant discharge power condition. Applied Physics Letters, 89 (16). 161506pp. doi:10.1063/1.2363945

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Reference TypeJournal (article/letter/editorial)
TitleDriving frequency effect on the electron energy distribution function in capacitive discharge under constant discharge power condition
JournalApplied Physics Letters
AuthorsAhn, S. K.Author
You, S. J.Author
Chang, H. Y.Author
Year2006 (October 16)Volume89
Issue16
PublisherAIP Publishing
DOIdoi:10.1063/1.2363945Search in ResearchGate
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Mindat Ref. ID8550189Long-form Identifiermindat:1:5:8550189:2
GUID0
Full ReferenceAhn, S. K., You, S. J., Chang, H. Y. (2006) Driving frequency effect on the electron energy distribution function in capacitive discharge under constant discharge power condition. Applied Physics Letters, 89 (16). 161506pp. doi:10.1063/1.2363945
Plain TextAhn, S. K., You, S. J., Chang, H. Y. (2006) Driving frequency effect on the electron energy distribution function in capacitive discharge under constant discharge power condition. Applied Physics Letters, 89 (16). 161506pp. doi:10.1063/1.2363945
In(2006, October) Applied Physics Letters Vol. 89 (16) AIP Publishing

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You, S. J., Ahn, S. K., Chang, H. Y. (2006) Driving frequency effect on electron heating mode transition in capacitive discharge. Applied Physics Letters, 89 (17). 171502pp. doi:10.1063/1.2348739
You, S. J., Chung, C. W., Chang, H. Y. (2005) Feature of electron energy distribution in a low-pressure capacitive discharge. Applied Physics Letters, 87 (4). 41501pp. doi:10.1063/1.1928320
Ahn, S. K., Chang, H. Y. (2008) Experimental observation of the inductive electric field and related plasma nonuniformity in high frequency capacitive discharge. Applied Physics Letters, 93 (3). 31506pp. doi:10.1063/1.2965118
You, S. J., Kim, S. S., Kim, Jung-Hyung, Seong, Dae-Jin, Shin, Yong-Hyeon, Chang, H. Y. (2007) Gap length effect on electron energy distribution in capacitive radio frequency discharges. Applied Physics Letters, 91 (22). 221501pp. doi:10.1063/1.2805032
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Chen, W. C., Zhu, X. M., Zhang, S., Pu, Y. K. (2009) Reconstruction of ion energy distribution function in a capacitive rf discharge. Applied Physics Letters, 94 (21). 211503pp. doi:10.1063/1.3147216
You, S. J., Kim, S. S., Chang, H. Y. (2004) Low energy electron cooling induced by a magnetic field in high pressure capacitive radio frequency discharges. Applied Physics Letters, 85 (21). 4872-4874 doi:10.1063/1.1805704
Chung, ChinWook, Kim, S. S., Chang, H. Y. (2004) Experimental measurement of the electron energy distribution function in the radio frequency electron cyclotron resonance inductive discharge. Physical Review E, 69 (1) doi:10.1103/physreve.69.016406
Barnes, Michael S., Forster, John C., Keller, John H. (1993) Electron energy distribution function measurements in a planar inductive oxygen radio frequency glow discharge. Applied Physics Letters, 62 (21). 2622-2624 doi:10.1063/1.109265
Seo, Sang-Hun, Kim, S. S., Hong, Jung-In, Chang, C. S., Chang, Hong-Young (2000) Evolution of the electron energy distribution function in a planar inductive argon discharge. Applied Physics Letters, 76 (2). 149-151 doi:10.1063/1.125685
Sharma, Sarveshwar, Sirse, Nishant, Kuley, Animesh, Sen, Abhijit, Turner, Miles M (2021) Driving frequency effect on discharge parameters and higher harmonic generation in capacitive discharges at constant power densities. Journal of Physics D: Applied Physics, 54 (5) 55205pp. doi:10.1088/1361-6463/abc11b
 
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