Lu, Ching-Sen, Lin, Horng-Chih, Huang, Jian-Ming, Lee, Yao-Jen (2007) Impacts of a polycrystalline-silicon buffer layer on the performance and reliability of strained n-channel metal-oxide-semiconductor field-effect transistors with SiN capping. Applied Physics Letters, 90 (12). 122110pp. doi:10.1063/1.2715122
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Impacts of a polycrystalline-silicon buffer layer on the performance and reliability of strained n-channel metal-oxide-semiconductor field-effect transistors with SiN capping | ||
| Journal | Applied Physics Letters | ||
| Authors | Lu, Ching-Sen | Author | |
| Lin, Horng-Chih | Author | ||
| Huang, Jian-Ming | Author | ||
| Lee, Yao-Jen | Author | ||
| Year | 2007 (March 19) | Volume | 90 |
| Issue | 12 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.2715122Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 8553010 | Long-form Identifier | mindat:1:5:8553010:4 |
| GUID | 0 | ||
| Full Reference | Lu, Ching-Sen, Lin, Horng-Chih, Huang, Jian-Ming, Lee, Yao-Jen (2007) Impacts of a polycrystalline-silicon buffer layer on the performance and reliability of strained n-channel metal-oxide-semiconductor field-effect transistors with SiN capping. Applied Physics Letters, 90 (12). 122110pp. doi:10.1063/1.2715122 | ||
| Plain Text | Lu, Ching-Sen, Lin, Horng-Chih, Huang, Jian-Ming, Lee, Yao-Jen (2007) Impacts of a polycrystalline-silicon buffer layer on the performance and reliability of strained n-channel metal-oxide-semiconductor field-effect transistors with SiN capping. Applied Physics Letters, 90 (12). 122110pp. doi:10.1063/1.2715122 | ||
| In | (2007, March) Applied Physics Letters Vol. 90 (12) AIP Publishing | ||
See Also
These are possibly similar items as determined by title/reference text matching only.
