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Barnat, E. V., Miller, P. A., Hebner, G. A., Paterson, A. M., Panagopoulos, Theodoros, Hammond, Edward, Holland, J. (2007) Measured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges. Applied Physics Letters, 90 (20). 201503pp. doi:10.1063/1.2735934

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Reference TypeJournal (article/letter/editorial)
TitleMeasured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges
JournalApplied Physics Letters
AuthorsBarnat, E. V.Author
Miller, P. A.Author
Hebner, G. A.Author
Paterson, A. M.Author
Panagopoulos, TheodorosAuthor
Hammond, EdwardAuthor
Holland, J.Author
Year2007 (May 14)Volume90
Issue20
PublisherAIP Publishing
DOIdoi:10.1063/1.2735934Search in ResearchGate
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Mindat Ref. ID8554112Long-form Identifiermindat:1:5:8554112:8
GUID0
Full ReferenceBarnat, E. V., Miller, P. A., Hebner, G. A., Paterson, A. M., Panagopoulos, Theodoros, Hammond, Edward, Holland, J. (2007) Measured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges. Applied Physics Letters, 90 (20). 201503pp. doi:10.1063/1.2735934
Plain TextBarnat, E. V., Miller, P. A., Hebner, G. A., Paterson, A. M., Panagopoulos, Theodoros, Hammond, Edward, Holland, J. (2007) Measured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges. Applied Physics Letters, 90 (20). 201503pp. doi:10.1063/1.2735934
In(2007, May) Applied Physics Letters Vol. 90 (20) AIP Publishing

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Barnat, E. V., Hebner, G. A. (2005) Radio frequency sheath formation and excitation around a stepped electrode. Journal of Applied Physics, 97 (6). 63301pp. doi:10.1063/1.1846939
Barnat, E. V., Hebner, G. A. (2004) Electric fields in a sheath near a metal–dielectric interface. Applied Physics Letters, 85 (16). 3393-3395 doi:10.1063/1.1766075
Barnat, E. V., Hebner, G. A. (2004) Radiofrequency sheath fields above a metal-dielectric interface. Journal of Applied Physics, 96 (9). 4762-4770 doi:10.1063/1.1794901
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Woodworth, J. R., Riley, M. E., Miller, P. A., Hebner, G. A., Hamilton, T. W. (1997) Ion energy and angular distributions in inductively driven radio frequency discharges in chlorine. Journal of Applied Physics, 81 (9). 5950-5959 doi:10.1063/1.364383
Hebner, G. A., Greenberg, K. E., Riley, M. E. (1994) Electric fields in high‐frequency parallel‐plate helium discharges. Journal of Applied Physics, 76 (7). 4036-4044 doi:10.1063/1.357351
Perret, A., Chabert, P., Jolly, J., Booth, J.-P. (2005) Ion energy uniformity in high-frequency capacitive discharges. Applied Physics Letters, 86 (2). 21501pp. doi:10.1063/1.1848183
Börnig, Karla (1992) Modeling a collisional, capacitive sheath for surface modification applications in radio‐frequency discharges. Applied Physics Letters, 60 (13). 1553-1555 doi:10.1063/1.107248
Barnat, E. V., Kolobov, V. I. (2013) Nonmonotonic radial distribution of excited atoms in a positive column of pulsed direct currect discharges in helium. Applied Physics Letters, 102 (3). 34104pp. doi:10.1063/1.4788689
Barnat, E. V., Hebner, G. A. (2005) Plasma nonuniformities induced by dissimilar electrode metals. Journal of Applied Physics, 98 (1). 13305pp. doi:10.1063/1.1941481
Haas, F. A., Al-Kuzee, J., Braithwaite, N. St. J. (2005) Electron and ion sheath effects on a microwave “hairpin” probe. Applied Physics Letters, 87 (20). 201503pp. doi:10.1063/1.2131196
 
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