Smets, A. H. M., Matsui, T., Kondo, M. (2008) Infrared analysis of the bulk silicon-hydrogen bonds as an optimization tool for high-rate deposition of microcrystalline silicon solar cells. Applied Physics Letters, 92 (3). 33506pp. doi:10.1063/1.2837536

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Reference Type	Journal (article/letter/editorial)
Title	Infrared analysis of the bulk silicon-hydrogen bonds as an optimization tool for high-rate deposition of microcrystalline silicon solar cells
Journal	Applied Physics Letters
Authors	Smets, A. H. M.		Author
	Matsui, T.		Author
	Kondo, M.		Author
Year	2008 (January 21)	Volume	92
Issue	3
Publisher	AIP Publishing
DOI	doi:10.1063/1.2837536Search in ResearchGate
	Generate Citation Formats
Mindat Ref. ID	8565369	Long-form Identifier	mindat:1:5:8565369:0
GUID	0
Full Reference	Smets, A. H. M., Matsui, T., Kondo, M. (2008) Infrared analysis of the bulk silicon-hydrogen bonds as an optimization tool for high-rate deposition of microcrystalline silicon solar cells. Applied Physics Letters, 92 (3). 33506pp. doi:10.1063/1.2837536
Plain Text	Smets, A. H. M., Matsui, T., Kondo, M. (2008) Infrared analysis of the bulk silicon-hydrogen bonds as an optimization tool for high-rate deposition of microcrystalline silicon solar cells. Applied Physics Letters, 92 (3). 33506pp. doi:10.1063/1.2837536
In	(2008, January) Applied Physics Letters Vol. 92 (3) AIP Publishing

	Smets, A. H. M., Matsui, T., Kondo, M. (2008) High-rate deposition of microcrystalline silicon p-i-n solar cells in the high pressure depletion regime. Journal of Applied Physics, 104 (3). 34508pp. doi:10.1063/1.2961334
	Matsui, Takuya, Kondo, Michio, Matsuda, Akihisa (2003) Origin of the Improved Performance of High-Deposition-Rate Microcrystalline Silicon Solar Cells by High-Pressure Glow Discharge. Japanese Journal of Applied Physics, 42. doi:10.1143/jjap.42.l901
	Ganguly, G., Ikeda, T., Nishimiya, T., Saitoh, K., Kondo, M., Matsuda, A. (1996) Hydrogenated microcrystalline silicon germanium: A bottom cell material for amorphous silicon‐based tandem solar cells. Applied Physics Letters, 69 (27). 4224-4226 doi:10.1063/1.116993
	Smets, A.H.M., Kondo, M. (2006) The role of ion-bulk interactions during high rate deposition of microcrystalline silicon by means of the multi-hole-cathode VHF plasma. Journal of Non-Crystalline Solids, 352 (9) 937-940 doi:10.1016/j.jnoncrysol.2005.10.073
	Gordijn, A., Pollet-Villard, A., Finger, F. (2011) At the limit of total silane gas utilization for preparation of high-quality microcrystalline silicon solar cells at high-rate plasma deposition. Applied Physics Letters, 98 (21). 211501pp. doi:10.1063/1.3593377
	Mai, Y., Klein, S., Geng, X., Finger, F. (2004) Structure adjustment during high-deposition-rate growth of microcrystalline silicon solar cells. Applied Physics Letters, 85 (14). 2839-2841 doi:10.1063/1.1801676
	Fujibayashi, Takashi, Kondo, Michio (2006) Roles of microcrystalline silicon p layer as seed, window, and doping layers for microcrystalline silicon p‐i‐n solar cells. Journal of Applied Physics, 99 (4). 43703pp. doi:10.1063/1.2173042
	Saitoh, K., Kondo, M., Fukawa, M., Nishimiya, T., Matsuda, A., Futako, W., Shimizu, I. (1997) Role of the hydrogen plasma treatment in layer-by-layer deposition of microcrystalline silicon. Applied Physics Letters, 71 (23). 3403-3405 doi:10.1063/1.120324
	Dingemans, G., van den Donker, M. N., Hrunski, D., Gordijn, A., Kessels, W. M. M., van de Sanden, M. C. M. (2008) The atomic hydrogen flux to silicon growth flux ratio during microcrystalline silicon solar cell deposition. Applied Physics Letters, 93 (11). 111914pp. doi:10.1063/1.2987519
	Abe, Yusuke, Fukushima, Atsushi, Takeda, Keigo, Kondo, Hiroki, Ishikawa, Kenji, Sekine, Makoto, Hori, Masaru (2012) Critical flux ratio of hydrogen radical to film precursor in microcrystalline silicon deposition for solar cells. Applied Physics Letters, 101 (17). 172109pp. doi:10.1063/1.4764065
	Myong, Seung Yeop, Lim, Koeng Su (2005) Natural hydrogen treatment effect during formation of double amorphous silicon-carbide p layer structures producing high-efficiency pin-type amorphous silicon solar cells. Applied Physics Letters, 86 (3). 33506pp. doi:10.1063/1.1853492

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Smets, A. H. M., Matsui, T., Kondo, M. (2008) Infrared analysis of the bulk silicon-hydrogen bonds as an optimization tool for high-rate deposition of microcrystalline silicon solar cells. Applied Physics Letters, 92 (3). 33506pp. doi:10.1063/1.2837536

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