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Chang, K.-S., Green, M. L., Levin, I., Hattrick-Simpers, J. R., Jaye, C., Fischer, D. A., Takeuchi, I., De Gendt, S. (2010) Physical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film. Applied Physics Letters, 96 (19). 192114pp. doi:10.1063/1.3428788

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Reference TypeJournal (article/letter/editorial)
TitlePhysical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film
JournalApplied Physics Letters
AuthorsChang, K.-S.Author
Green, M. L.Author
Levin, I.Author
Hattrick-Simpers, J. R.Author
Jaye, C.Author
Fischer, D. A.Author
Takeuchi, I.Author
De Gendt, S.Author
Year2010 (May 10)Volume96
Issue19
PublisherAIP Publishing
DOIdoi:10.1063/1.3428788Search in ResearchGate
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Mindat Ref. ID8583398Long-form Identifiermindat:1:5:8583398:6
GUID0
Full ReferenceChang, K.-S., Green, M. L., Levin, I., Hattrick-Simpers, J. R., Jaye, C., Fischer, D. A., Takeuchi, I., De Gendt, S. (2010) Physical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film. Applied Physics Letters, 96 (19). 192114pp. doi:10.1063/1.3428788
Plain TextChang, K.-S., Green, M. L., Levin, I., Hattrick-Simpers, J. R., Jaye, C., Fischer, D. A., Takeuchi, I., De Gendt, S. (2010) Physical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film. Applied Physics Letters, 96 (19). 192114pp. doi:10.1063/1.3428788
In(2010, May) Applied Physics Letters Vol. 96 (19) AIP Publishing

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