Koch, Christoph T., Özdöl, V. Burak, van Aken, Peter A. (2010) An efficient, simple, and precise way to map strain with nanometer resolution in semiconductor devices. Applied Physics Letters, 96 (9). 91901pp. doi:10.1063/1.3337090
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | An efficient, simple, and precise way to map strain with nanometer resolution in semiconductor devices | ||
Journal | Applied Physics Letters | ||
Authors | Koch, Christoph T. | Author | |
Özdöl, V. Burak | Author | ||
van Aken, Peter A. | Author | ||
Year | 2010 (March) | Volume | 96 |
Issue | 9 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.3337090Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8586035 | Long-form Identifier | mindat:1:5:8586035:1 |
GUID | 0 | ||
Full Reference | Koch, Christoph T., Özdöl, V. Burak, van Aken, Peter A. (2010) An efficient, simple, and precise way to map strain with nanometer resolution in semiconductor devices. Applied Physics Letters, 96 (9). 91901pp. doi:10.1063/1.3337090 | ||
Plain Text | Koch, Christoph T., Özdöl, V. Burak, van Aken, Peter A. (2010) An efficient, simple, and precise way to map strain with nanometer resolution in semiconductor devices. Applied Physics Letters, 96 (9). 91901pp. doi:10.1063/1.3337090 | ||
In | (2010, March) Applied Physics Letters Vol. 96 (9) AIP Publishing |
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