Wang, Bing, Bian Chew, Ah, Teng, Jinghua, Si, Guangyuan, Danner, Aaron J. (2011) Subwavelength lithography by waveguide mode interference. Applied Physics Letters, 99 (15). 151106pp. doi:10.1063/1.3651274
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Subwavelength lithography by waveguide mode interference | ||
Journal | Applied Physics Letters | ||
Authors | Wang, Bing | Author | |
Bian Chew, Ah | Author | ||
Teng, Jinghua | Author | ||
Si, Guangyuan | Author | ||
Danner, Aaron J. | Author | ||
Year | 2011 (October 10) | Volume | 99 |
Issue | 15 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.3651274Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8596609 | Long-form Identifier | mindat:1:5:8596609:9 |
GUID | 0 | ||
Full Reference | Wang, Bing, Bian Chew, Ah, Teng, Jinghua, Si, Guangyuan, Danner, Aaron J. (2011) Subwavelength lithography by waveguide mode interference. Applied Physics Letters, 99 (15). 151106pp. doi:10.1063/1.3651274 | ||
Plain Text | Wang, Bing, Bian Chew, Ah, Teng, Jinghua, Si, Guangyuan, Danner, Aaron J. (2011) Subwavelength lithography by waveguide mode interference. Applied Physics Letters, 99 (15). 151106pp. doi:10.1063/1.3651274 | ||
In | (2011, October) Applied Physics Letters Vol. 99 (15) AIP Publishing |
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