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Chan, Wing S., Saarinen, Mika J., Talghader, Joseph J. (2013) Fabrication and operation of an electrostatic actuator for controlling nanometer-scale gaps in collapsed cantilever heterostructures. Applied Physics Letters, 102 (24). 243508pp. doi:10.1063/1.4812185

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Reference TypeJournal (article/letter/editorial)
TitleFabrication and operation of an electrostatic actuator for controlling nanometer-scale gaps in collapsed cantilever heterostructures
JournalApplied Physics Letters
AuthorsChan, Wing S.Author
Saarinen, Mika J.Author
Talghader, Joseph J.Author
Year2013 (June 17)Volume102
Issue24
PublisherAIP Publishing
DOIdoi:10.1063/1.4812185Search in ResearchGate
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Mindat Ref. ID8614095Long-form Identifiermindat:1:5:8614095:3
GUID0
Full ReferenceChan, Wing S., Saarinen, Mika J., Talghader, Joseph J. (2013) Fabrication and operation of an electrostatic actuator for controlling nanometer-scale gaps in collapsed cantilever heterostructures. Applied Physics Letters, 102 (24). 243508pp. doi:10.1063/1.4812185
Plain TextChan, Wing S., Saarinen, Mika J., Talghader, Joseph J. (2013) Fabrication and operation of an electrostatic actuator for controlling nanometer-scale gaps in collapsed cantilever heterostructures. Applied Physics Letters, 102 (24). 243508pp. doi:10.1063/1.4812185
In(2013, June) Applied Physics Letters Vol. 102 (24) AIP Publishing

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