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Bollanti, S., Di Lazzaro, P., Flora, F., Mezi, L., Murra, D., Torre, A. (2009) Laser–plasma–source debris-related investigations: an aspect of the ENEA micro-exposure tool. Applied Physics B, 96 (2). 479-490 doi:10.1007/s00340-009-3583-z

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Reference TypeJournal (article/letter/editorial)
TitleLaser–plasma–source debris-related investigations: an aspect of the ENEA micro-exposure tool
JournalApplied Physics B
AuthorsBollanti, S.Author
Di Lazzaro, P.Author
Flora, F.Author
Mezi, L.Author
Murra, D.Author
Torre, A.Author
Year2009 (August)Volume96
Issue2
PublisherSpringer Science and Business Media LLC
DOIdoi:10.1007/s00340-009-3583-zSearch in ResearchGate
Generate Citation Formats
Mindat Ref. ID9020767Long-form Identifiermindat:1:5:9020767:1
GUID0
Full ReferenceBollanti, S., Di Lazzaro, P., Flora, F., Mezi, L., Murra, D., Torre, A. (2009) Laser–plasma–source debris-related investigations: an aspect of the ENEA micro-exposure tool. Applied Physics B, 96 (2). 479-490 doi:10.1007/s00340-009-3583-z
Plain TextBollanti, S., Di Lazzaro, P., Flora, F., Mezi, L., Murra, D., Torre, A. (2009) Laser–plasma–source debris-related investigations: an aspect of the ENEA micro-exposure tool. Applied Physics B, 96 (2). 479-490 doi:10.1007/s00340-009-3583-z
In(2009, August) Applied Physics B Vol. 96 (2) Springer Science and Business Media LLC

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Bollanti, S., Di Lazzaro, P., Flora, F., Mezi, L., Murra, D., Torre, A. (2008) Further comparisons between the conventional and the modified Schwarzschild objectives. Applied Physics B, 91 (1). 127-137 doi:10.1007/s00340-008-2970-1
Bollanti, S., Di Lazzaro, P., Flora, F., Mezi, L., Murra, D., Torre, A. (2006) Conventional and modified Schwarzschild objective for EUV lithography: design relations. Applied Physics B, 85 (4). 603-610 doi:10.1007/s00340-006-2405-9
Bollanti, S., Di Lazzaro, P., Flora, F., Mezi, L., Murra, D., Torre, A. (2008) First results of high-resolution patterning by the ENEA laboratory-scale extreme ultraviolet projection lithography system. EPL (Europhysics Letters), 84. 58003pp. doi:10.1209/0295-5075/84/58003
Bollanti, S., De Meis, D., Di Lazzaro, P., Flora, F., Gallerano, G. P., Mezi, L., Murra, D., Vicca, D. (2016) Performance of an electro-optical solar compass in partially obscured Sun conditions. Applied Optics, 55. 3126pp. doi:10.1364/ao.55.003126
Bollanti, S., Di Lazzaro, P., Flora, F., Mezi, L., Murra, D., Torre, A. (2013) New technique for aberration diagnostics and alignment of an extreme ultraviolet Schwarzschild objective. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 720. 168-172 doi:10.1016/j.nima.2012.12.008
Di Lazzaro, Paolo, Bollanti, Sarah, Flora, Francesco, Mezi, Luca, Murra, Daniele, Torre, Amalia (2013) Mitigation of ion and particulate emission from laser-produced plasmas used for extreme ultraviolet lithography. Applied Surface Science, 272. 13-18 doi:10.1016/j.apsusc.2012.03.155
ALBERTANO, P., REALE, L., PALLADINO, L., REALE, A., COTTON, R., BOLLANTI, S., DI LAZZARO, P., FLORA, F., LISI, N., NOTTOLA, A., VIGLI PAPADAKI, K., LETARDI, T., BANAI, D., CONTI, A., MORET, M., GRILLI, A. (1997) X‐ray contact microscopy using an excimer laser plasma source with different target materials and laser pulse durations. Journal of Microscopy, 187 (2). 96-103 doi:10.1046/j.1365-2818.1997.2120768.x
Bollanti, S., Di Lazzaro, P., Flora, F., Giordano, G., Hermsen, T., Letardi, T., Zheng, C. E. (1990) Performance of a ten-liter electron avalanche-discharge XeCl laser device. Applied Physics B, 50 (5). 415-423 doi:10.1007/bf00325095
Bollanti, S., Di Lazzaro, P., Murra, D. (2004) More about the light beam shaping by the integration method. The European Physical Journal Applied Physics, 28 (2). 179-186 doi:10.1051/epjap:2004164
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