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Du, Liyong, Bai, Yanlong, Chu, Wenxiang, Ding, Yuqiang (2018) Synthesis of two aminosilanes as CVD precursors of SiCxNy films: Tuning film composition by Molecular Structures. Phosphorus, Sulfur, and Silicon and the Related Elements, 193. 568-573 doi:10.1080/10426507.2018.1455682

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Reference TypeJournal (article/letter/editorial)
TitleSynthesis of two aminosilanes as CVD precursors of SiCxNy films: Tuning film composition by Molecular Structures
JournalPhosphorus, Sulfur, and Silicon and the Related Elements
AuthorsDu, LiyongAuthor
Bai, YanlongAuthor
Chu, WenxiangAuthor
Ding, YuqiangAuthor
Year2018 (September 2)Volume193
PublisherInforma UK Limited
DOIdoi:10.1080/10426507.2018.1455682Search in ResearchGate
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Mindat Ref. ID9771613Long-form Identifiermindat:1:5:9771613:2
GUID0
Full ReferenceDu, Liyong, Bai, Yanlong, Chu, Wenxiang, Ding, Yuqiang (2018) Synthesis of two aminosilanes as CVD precursors of SiCxNy films: Tuning film composition by Molecular Structures. Phosphorus, Sulfur, and Silicon and the Related Elements, 193. 568-573 doi:10.1080/10426507.2018.1455682
Plain TextDu, Liyong, Bai, Yanlong, Chu, Wenxiang, Ding, Yuqiang (2018) Synthesis of two aminosilanes as CVD precursors of SiCxNy films: Tuning film composition by Molecular Structures. Phosphorus, Sulfur, and Silicon and the Related Elements, 193. 568-573 doi:10.1080/10426507.2018.1455682
In(n.d.) Phosphorus, Sulfur, and Silicon and the Related Elements Vol. 193. Informa UK Limited

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Chu, Wenxiang, Du, Liyong, Xu, Chongying, Ding, Yuqiang (2016) Synthesis, characterization, and thermal properties of silicon(IV) compounds containing amidinate ligands as CVD precursors. Phosphorus, Sulfur, and Silicon and the Related Elements, 191. 1280-1283 doi:10.1080/10426507.2016.1192619
Du, Liyong, Chu, Wenxiang, Ding, Yuqiang (2017) Synthesis, characterization, and properties of silicon (IV) compounds containing N,N'-symmetrically alkyl substituted 1,3-diketimine ligands and their potential as CVD precursor material. Phosphorus, Sulfur, and Silicon and the Related Elements, 192. 1212-1218 doi:10.1080/10426507.2017.1358718
Du, Liyong, Chu, Wenxiang, Miao, Hongyan, Xu, Chongying, Ding, Yuqiang (2015) Synthesis, characterization, thermal properties of silicon(iv) compounds containing guanidinato ligands and their potential as CVD precursors. RSC Advances, 5 (88). 71637-71643 doi:10.1039/c5ra09755j
Du, Liyong, Chu, Wenxiang, Xu, Chongying, Miao, Hongyan, Ding, Yuqiang (2015) Synthesis, characterization of silicon(iv) compounds containing 2-alkyl-aminopyridine ligands and evaluation of them as CVD precursors. RSC Advances, 5 (74). 59991-59996 doi:10.1039/c5ra07045g
Du, Liyong, Xu, Chongying, Chu, Wenxiang, Ding, Yuqiang (2016) A family of 1,1,1,2,2,2-hexa(-primary-)amino-disilanes as potential CVD precursors: Tuning thermal properties by small variation of the substituent. Polyhedron, 117. 729-734 doi:10.1016/j.poly.2016.07.012
Du, Liyong, Chu, Wenxiang, Miao, Hongyan, Wang, Dawei, Xu, Chongying, Ding, Yuqiang (2015) Synthesis, Characterization, and Thermal Properties of Chlorine-Containing 1,1,2,2-Tetraaminodisilanes and Their Potential as Chemical Vapor Deposition Precursors for Silicon Nitride Films. European Journal of Inorganic Chemistry, 2015 (19) 3205-3211 doi:10.1002/ejic.201500493
Kornilov, K. N. (2018) Amides of phosphorus-organic acids: General precursors for the synthesis of phosphorus-arene crown esters. Phosphorus, Sulfur, and Silicon and the Related Elements, 193. 484-487 doi:10.1080/10426507.2018.1452237
Du, Liyong, Chu, Wenxiang, Miao, Hongyan, Wang, Dawei, Xu, Chongying, Ding, Yuqiang (2015) Synthesis, Characterization, Thermal Property of Si(c-C5H9NH)4and Its Potential as CVD Precursor for SiC Film. Zeitschrift für anorganische und allgemeine Chemie, 641. 1813-1817 doi:10.1002/zaac.201500143
Zhang, Yuxiang, Du, Liyong, Liu, Xinfang, Ding, Yuqiang (2018) A nickel(II) guanidinate compound and its potential as CVD precursor for nickel related films. Polyhedron, 156. 218-222 doi:10.1016/j.poly.2018.09.043
Welker, Mark E. (2020) Synthesis of sulfur and silicon SAM precursors for molecular electronics applications. Phosphorus, Sulfur, and Silicon and the Related Elements, 195. 75-87 doi:10.1080/10426507.2019.1653871
Hu, Xuecheng, Sun, Tingquan, Zheng, Chunyang (2018) Synthesis, crystal structures and magnetic properties of two iron (II) tris(pyridyl)phosphine selenides complexes. Phosphorus, Sulfur, and Silicon and the Related Elements, 193. 300-305 doi:10.1080/10426507.2017.1417295
 
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