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Klumpp, A., Sigmund, H. (1989) Deposition of high quality SiO2 layers from TEOS by excimer laser. Applied Surface Science, 36. 141-149 doi:10.1016/0169-4332(89)90907-0

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Reference TypeJournal (article/letter/editorial)
TitleDeposition of high quality SiO2 layers from TEOS by excimer laser
JournalApplied Surface Science
AuthorsKlumpp, A.Author
Sigmund, H.Author
Year1989 (January)Volume36
PublisherElsevier BV
DOIdoi:10.1016/0169-4332(89)90907-0Search in ResearchGate
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Mindat Ref. ID9894597Long-form Identifiermindat:1:5:9894597:1
GUID0
Full ReferenceKlumpp, A., Sigmund, H. (1989) Deposition of high quality SiO2 layers from TEOS by excimer laser. Applied Surface Science, 36. 141-149 doi:10.1016/0169-4332(89)90907-0
Plain TextKlumpp, A., Sigmund, H. (1989) Deposition of high quality SiO2 layers from TEOS by excimer laser. Applied Surface Science, 36. 141-149 doi:10.1016/0169-4332(89)90907-0
In(n.d.) Applied Surface Science Vol. 36. Elsevier BV

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Klumpp, A., Sigmund, H. (1989) Photoinduced transformation of polysiloxane layers to SiO2. Applied Surface Science, 43. 301-303 doi:10.1016/0169-4332(89)90229-8
León, B., Klumpp, A., Pérez-Amor, M., Sigmund, H. (1990) Excimer laser deposition of silica films: a comparison between two methods. Applied Surface Science, 46. 210-214 doi:10.1016/0169-4332(90)90144-o
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Fogarassy, E., Slaoui, A., Fuchs, C., Stoquert, J.P. (1990) Deposition of SiO2 by reactive excimer laser ablation from a SiO target. Applied Surface Science, 46. 195-199 doi:10.1016/0169-4332(90)90141-l
Guilly, J., Pennaneach, M. (1989) Thin layers obtained by plasma jet deposition at low pressure. Applied Surface Science, 36. 170-176 doi:10.1016/0169-4332(89)90911-2
Al-Chalabi, S.A.M., Goodall, F. (1989) Titanium diffusion into LiNbO3 using excimer laser beam. Applied Surface Science, 36. 408-412 doi:10.1016/0169-4332(89)90936-7
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Afonso, C.N., Vega, F., Gonzalo, J., Zaldo, C. (1993) Lithium niobate films grown by excimer laser deposition. Applied Surface Science, 69. 149-155 doi:10.1016/0169-4332(93)90496-x
 
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