Reference Type | Journal (article/letter/editorial) |
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Title | Laser photoablation of spin-on-glass and poly(ethyl cyanoacrylate) photoresist |
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Journal | Applied Surface Science |
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Authors | Hogan, M. | Author |
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Magan, J.D. | Author |
Blau, W. | Author |
Lunney, J.G. | Author |
Woods, J. | Author |
Year | 1989 (January) | Volume | 36 |
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Publisher | Elsevier BV |
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DOI | doi:10.1016/0169-4332(89)90929-xSearch in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 9894619 | Long-form Identifier | mindat:1:5:9894619:2 |
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GUID | 0 |
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Full Reference | Hogan, M., Magan, J.D., Blau, W., Lunney, J.G., Woods, J. (1989) Laser photoablation of spin-on-glass and poly(ethyl cyanoacrylate) photoresist. Applied Surface Science, 36. 343-349 doi:10.1016/0169-4332(89)90929-x |
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Plain Text | Hogan, M., Magan, J.D., Blau, W., Lunney, J.G., Woods, J. (1989) Laser photoablation of spin-on-glass and poly(ethyl cyanoacrylate) photoresist. Applied Surface Science, 36. 343-349 doi:10.1016/0169-4332(89)90929-x |
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In | (n.d.) Applied Surface Science Vol. 36. Elsevier BV |
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