Reference Type | Journal (article/letter/editorial) |
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Title | Precise chemical analysis development for silicon wafers after rapid thermal processing |
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Journal | Applied Surface Science |
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Authors | Briantseva, T.A | Author |
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Lebedeva, Z.M | Author |
Lioubtchenko, D.V | Author |
Markov, I.A | Author |
Nolan, M | Author |
Perova, T.S | Author |
Moore, R.A | Author |
Year | 2000 (February) | Volume | 156 |
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Publisher | Elsevier BV |
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DOI | doi:10.1016/s0169-4332(99)00509-7Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 9901756 | Long-form Identifier | mindat:1:5:9901756:7 |
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GUID | 0 |
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Full Reference | Briantseva, T.A, Lebedeva, Z.M, Lioubtchenko, D.V, Markov, I.A, Nolan, M, Perova, T.S, Moore, R.A (2000) Precise chemical analysis development for silicon wafers after rapid thermal processing. Applied Surface Science, 156. 21-25 doi:10.1016/s0169-4332(99)00509-7 |
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Plain Text | Briantseva, T.A, Lebedeva, Z.M, Lioubtchenko, D.V, Markov, I.A, Nolan, M, Perova, T.S, Moore, R.A (2000) Precise chemical analysis development for silicon wafers after rapid thermal processing. Applied Surface Science, 156. 21-25 doi:10.1016/s0169-4332(99)00509-7 |
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In | (n.d.) Applied Surface Science Vol. 156. Elsevier BV |
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