Reference Type | Journal (article/letter/editorial) |
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Title | Properties of fluorinated amorphous diamond like carbon films by PECVD |
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Journal | Applied Surface Science |
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Authors | Yu, G.Q. | Author |
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Tay, B.K. | Author |
Sun, Z. | Author |
Pan, L.K. | Author |
Year | 2003 (December) | Volume | 219 |
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Publisher | Elsevier BV |
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DOI | doi:10.1016/s0169-4332(03)00644-5Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 9905486 | Long-form Identifier | mindat:1:5:9905486:9 |
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GUID | 0 |
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Full Reference | Yu, G.Q., Tay, B.K., Sun, Z., Pan, L.K. (2003) Properties of fluorinated amorphous diamond like carbon films by PECVD. Applied Surface Science, 219. 228-237 doi:10.1016/s0169-4332(03)00644-5 |
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Plain Text | Yu, G.Q., Tay, B.K., Sun, Z., Pan, L.K. (2003) Properties of fluorinated amorphous diamond like carbon films by PECVD. Applied Surface Science, 219. 228-237 doi:10.1016/s0169-4332(03)00644-5 |
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In | (n.d.) Applied Surface Science Vol. 219. Elsevier BV |
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