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Ehrhardt, M., Raciukaitis, G., Gecys, P., Zimmer, K. (2010) Microstructuring of fused silica by laser-induced backside wet etching using picosecond laser pulses. Applied Surface Science, 256. 7222-7227 doi:10.1016/j.apsusc.2010.05.055

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Reference TypeJournal (article/letter/editorial)
TitleMicrostructuring of fused silica by laser-induced backside wet etching using picosecond laser pulses
JournalApplied Surface Science
AuthorsEhrhardt, M.Author
Raciukaitis, G.Author
Gecys, P.Author
Zimmer, K.Author
Year2010 (September)Volume256
PublisherElsevier BV
DOIdoi:10.1016/j.apsusc.2010.05.055Search in ResearchGate
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Mindat Ref. ID9915070Long-form Identifiermindat:1:5:9915070:1
GUID0
Full ReferenceEhrhardt, M., Raciukaitis, G., Gecys, P., Zimmer, K. (2010) Microstructuring of fused silica by laser-induced backside wet etching using picosecond laser pulses. Applied Surface Science, 256. 7222-7227 doi:10.1016/j.apsusc.2010.05.055
Plain TextEhrhardt, M., Raciukaitis, G., Gecys, P., Zimmer, K. (2010) Microstructuring of fused silica by laser-induced backside wet etching using picosecond laser pulses. Applied Surface Science, 256. 7222-7227 doi:10.1016/j.apsusc.2010.05.055
In(n.d.) Applied Surface Science Vol. 256. Elsevier BV

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Ehrhardt, M., Raciukaitis, G., Gecys, P., Zimmer, K. (2010) Laser-induced backside wet etching of fluoride and sapphire using picosecond laser pulses. Applied Physics A, 101. 399-404 doi:10.1007/s00339-010-5833-7
Ehrhardt, M., Lorenz, P., Bayer, L., Han, B., Zimmer, K. (2018) Studies of the confinement at laser-induced backside dry etching using infrared nanosecond laser pulses. Applied Surface Science, 427. 686-692 doi:10.1016/j.apsusc.2017.08.099
Zimmer, Klaus, Ehrhardt, Martin, Böhme, Rico (2010) Simulation of laser-induced backside wet etching of fused silica with hydrocarbon liquids. Journal of Applied Physics, 107 (3). 34908pp. doi:10.1063/1.3276204
Böhme, R., Zimmer, K. (2005) The influence of the laser spot size and the pulse number on laser-induced backside wet etching. Applied Surface Science, 247. 256-261 doi:10.1016/j.apsusc.2005.01.058
Niino, Hiroyuki, Kawaguchi, Yoshizo, Sato, Tadatake, Narazaki, Aiko, Kurosaki, Ryozo (2007) Surface microstructuring of silica glass by laser-induced backside wet etching with a DPSS UV laser. Applied Surface Science, 253. 8287-8291 doi:10.1016/j.apsusc.2007.02.099
Lorenz, Pierre, Ehrhardt, Martin, Zimmer, Klaus (2013) Laser-induced front side etching of fused silica with femtosecond laser radiation using thin metal layers. Applied Surface Science, 278. 255-258 doi:10.1016/j.apsusc.2012.11.047
Vass, Cs., Osvay, K., Csete, M., Hopp, B. (2007) Fabrication of 550nm gratings in fused silica by laser induced backside wet etching technique. Applied Surface Science, 253. 8059-8063 doi:10.1016/j.apsusc.2007.02.087
Vass, Cs., Kiss, B., Kopniczky, J., Hopp, B. (2013) Etching of fused silica fiber by metallic laser-induced backside wet etching technique. Applied Surface Science, 278. 241-244 doi:10.1016/j.apsusc.2012.11.163
Lorenz, Pierre, Ehrhardt, Martin, Wehrmann, Anja, Zimmer, Klaus (2012) Laser-induced front side etching of fused silica with XeF excimer laser using thin metal layers. Applied Surface Science, 258. 9138-9142 doi:10.1016/j.apsusc.2011.10.145
Zimmer, K., Böhme, R., Pissadakis, S., Hartwig, L., Reisse, G., Rauschenbach, B. (2006) Backside etching of fused silica with Nd:YAG laser. Applied Surface Science, 253. 2796-2800 doi:10.1016/j.apsusc.2006.05.059
Lorenz, P., Zajadacz, J., Bayer, L., Ehrhardt, M., Zimmer, K. (2015) Nanodrilling of fused silica using nanosecond laser radiation. Applied Surface Science, 351. 935-945 doi:10.1016/j.apsusc.2015.06.041
 
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