j.apsusc.2011.05.124

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Reference Type	Journal (article/letter/editorial)
Title	An undercutting model of atomic oxygen for multilayer silica/alumina films fabricated by plasma immersion implantation and deposition on polyimide
Journal	Applied Surface Science
Authors	Huang, Yongxian		Author
	Tian, Xiubo		Author
	Lv, Shixiong		Author
	Yang, Shiqin		Author
	Fu, R.K.Y.		Author
	Chu, Paul K.		Author
	Leng, Jinsong		Author
	Li, Yao		Author
Year	2011 (August)	Volume	257
Publisher	Elsevier BV
DOI	doi:10.1016/j.apsusc.2011.05.124Search in ResearchGate
	Generate Citation Formats
Mindat Ref. ID	9916508	Long-form Identifier	mindat:1:5:9916508:6
GUID	0
Full Reference	Huang, Yongxian, Tian, Xiubo, Lv, Shixiong, Yang, Shiqin, Fu, R.K.Y., Chu, Paul K., Leng, Jinsong, Li, Yao (2011) An undercutting model of atomic oxygen for multilayer silica/alumina films fabricated by plasma immersion implantation and deposition on polyimide. Applied Surface Science, 257. 9158-9163 doi:10.1016/j.apsusc.2011.05.124
Plain Text	Huang, Yongxian, Tian, Xiubo, Lv, Shixiong, Yang, Shiqin, Fu, R.K.Y., Chu, Paul K., Leng, Jinsong, Li, Yao (2011) An undercutting model of atomic oxygen for multilayer silica/alumina films fabricated by plasma immersion implantation and deposition on polyimide. Applied Surface Science, 257. 9158-9163 doi:10.1016/j.apsusc.2011.05.124
In	(n.d.) Applied Surface Science Vol. 257. Elsevier BV

	Huang, Yongxian, Tian, Xiubo, Lv, Shixiong, Yang, Shiqin, Fu, R.K.Y., Chu, Paul K., Leng, Jinsong, Li, Yao (2012) Ion trajectories and shadow effects in mesh-assisted plasma immersion ion implantation of insulator. Applied Surface Science, 258. 2910-2913 doi:10.1016/j.apsusc.2011.11.006
	Huang, Yongxian, Tian, Xiubo, Yang, Shiqin, Fu, Ricky K.Y., Chu, Paul K. (2007) Optical and mechanical properties of alumina films fabricated on Kapton polymer by plasma immersion ion implantation and deposition using different biases. Applied Surface Science, 253. 9483-9488 doi:10.1016/j.apsusc.2007.06.011
	Huang, Yongxian, Tian, Xiubo, Lv, Shixiong, Fu, Ricky K.Y., Chu, Paul K. (2012) Mechanical and optical characteristics of multilayer inorganic films on polyimide for anti-atomic-oxygen erosion. Applied Surface Science, 258. 5810-5814 doi:10.1016/j.apsusc.2012.02.104
	Wu, Zhongzhen, Tian, Xiubo, Wang, Zeming, Gong, Chunzhi, Yang, Shiqin, Tan, Cher Ming, Chu, Paul K. (2011) Microstructure and mechanical properties of CrN films fabricated by high power pulsed magnetron discharge plasma immersion ion implantation and deposition. Applied Surface Science, 258. 242-246 doi:10.1016/j.apsusc.2011.08.039
	Tian, Xiubo, Yang, Shiqin, Huang, Yongxian, Chu, Paul K, Fu, Ricky K Y (2004) Implantation dynamics of plasma implantation into insulating strips. Journal of Physics D: Applied Physics, 37. 50-54 doi:10.1088/0022-3727/37/1/009
	Tian, Xiubo, Fu, Ricky K. Y., Chu, Paul K., Anders, Andre, Gong, Chunzhi, Yang, Shiqin (2003) Flexible system for multiple plasma immersion ion implantation-deposition processes. Review of Scientific Instruments, 74 (12). 5137-5140 doi:10.1063/1.1626012
	Li, Jing, Gong, Chunzhi, Tian, Xiubo, Yang, Shiqin, Fu, Ricky K.Y., Chu, Paul K. (2009) Structure and gas-barrier properties of amorphous hydrogenated carbon films deposited on inner walls of cylindrical polyethylene terephthalate by plasma-enhanced chemical vapor deposition. Applied Surface Science, 255. 3983-3988 doi:10.1016/j.apsusc.2008.10.064
	Tian, Xiubo, Gong, Chunzhi, Huang, Yongxian, Jiang, Haifu, Yang, Shiqin, Fu, Ricky K. Y., Chu, Paul K. (2008) Ion trajectories in plasma ion implantation of slender cylindrical bores using a small inner end source. Applied Physics Letters, 93 (19). 191501pp. doi:10.1063/1.2988192
	Huang, Yongxian, Tian, Xiubo, Yang, Shiqin, Chu, Paul K. (2007) A ground-based radio frequency inductively coupled plasma apparatus for atomic oxygen simulation in low Earth orbit. Review of Scientific Instruments, 78 (10). 103301pp. doi:10.1063/1.2800766
	Zhu, Zongtao, Gong, Chunzhi, Tian, Xiubo, Yang, Shiqin, Fu, Ricky K. Y., Chu, Paul K. (2011) High voltage pulser with a fast fall-time for plasma immersion ion implantation. Review of Scientific Instruments, 82 (4). 45102pp. doi:10.1063/1.3575320
	Shi, Jingwei, Gong, Chunzhi, Tian, Xiubo, Yang, Shiqin, Chu, Paul K. (2012) Optical properties and chemical structures of Kapton-H film after proton irradiation by immersion in a hydrogen plasma. Applied Surface Science, 258. 3829-3834 doi:10.1016/j.apsusc.2011.12.037

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