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Meng, Jian-ping, Liu, Xiao-peng, Fu, Zhi-qiang, Wang, Xiao-jing, Hao, Lei (2015) Thermal stability of AlN films prepared by ion beam assisted deposition. Applied Surface Science, 347. 109-115 doi:10.1016/j.apsusc.2015.03.120

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Reference TypeJournal (article/letter/editorial)
TitleThermal stability of AlN films prepared by ion beam assisted deposition
JournalApplied Surface Science
AuthorsMeng, Jian-pingAuthor
Liu, Xiao-pengAuthor
Fu, Zhi-qiangAuthor
Wang, Xiao-jingAuthor
Hao, LeiAuthor
Year2015 (August)Volume347
PublisherElsevier BV
DOIdoi:10.1016/j.apsusc.2015.03.120Search in ResearchGate
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Mindat Ref. ID9925520Long-form Identifiermindat:1:5:9925520:0
GUID0
Full ReferenceMeng, Jian-ping, Liu, Xiao-peng, Fu, Zhi-qiang, Wang, Xiao-jing, Hao, Lei (2015) Thermal stability of AlN films prepared by ion beam assisted deposition. Applied Surface Science, 347. 109-115 doi:10.1016/j.apsusc.2015.03.120
Plain TextMeng, Jian-ping, Liu, Xiao-peng, Fu, Zhi-qiang, Wang, Xiao-jing, Hao, Lei (2015) Thermal stability of AlN films prepared by ion beam assisted deposition. Applied Surface Science, 347. 109-115 doi:10.1016/j.apsusc.2015.03.120
In(n.d.) Applied Surface Science Vol. 347. Elsevier BV

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