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Sowińska, Małgorzata, Brizzi, Simone, Das, Chittaranjan, Kärkkänen, Irina, Schneidewind, Jessica, Naumann, Franziska, Gargouri, Hassan, Henkel, Karsten, Schmeißer, Dieter (2016) Analysis of nitrogen species in titanium oxynitride ALD films. Applied Surface Science, 381. 42-47 doi:10.1016/j.apsusc.2016.02.096

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Reference TypeJournal (article/letter/editorial)
TitleAnalysis of nitrogen species in titanium oxynitride ALD films
JournalApplied Surface Science
AuthorsSowińska, MałgorzataAuthor
Brizzi, SimoneAuthor
Das, ChittaranjanAuthor
Kärkkänen, IrinaAuthor
Schneidewind, JessicaAuthor
Naumann, FranziskaAuthor
Gargouri, HassanAuthor
Henkel, KarstenAuthor
Schmeißer, DieterAuthor
Year2016 (September)Volume381
PublisherElsevier BV
DOIdoi:10.1016/j.apsusc.2016.02.096Search in ResearchGate
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Mindat Ref. ID9928515Long-form Identifiermindat:1:5:9928515:9
GUID0
Full ReferenceSowińska, Małgorzata, Brizzi, Simone, Das, Chittaranjan, Kärkkänen, Irina, Schneidewind, Jessica, Naumann, Franziska, Gargouri, Hassan, Henkel, Karsten, Schmeißer, Dieter (2016) Analysis of nitrogen species in titanium oxynitride ALD films. Applied Surface Science, 381. 42-47 doi:10.1016/j.apsusc.2016.02.096
Plain TextSowińska, Małgorzata, Brizzi, Simone, Das, Chittaranjan, Kärkkänen, Irina, Schneidewind, Jessica, Naumann, Franziska, Gargouri, Hassan, Henkel, Karsten, Schmeißer, Dieter (2016) Analysis of nitrogen species in titanium oxynitride ALD films. Applied Surface Science, 381. 42-47 doi:10.1016/j.apsusc.2016.02.096
In(n.d.) Applied Surface Science Vol. 381. Elsevier BV

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