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Xu, Jikai, Wang, Chenxi, Tian, Yanhong, Wu, Bin, Wang, Shang, Zhang, He (2018) Glass-on-LiNbO3 heterostructure formed via a two-step plasma activated low-temperature direct bonding method. Applied Surface Science, 459. 621-629 doi:10.1016/j.apsusc.2018.08.031

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Reference TypeJournal (article/letter/editorial)
TitleGlass-on-LiNbO3 heterostructure formed via a two-step plasma activated low-temperature direct bonding method
JournalApplied Surface Science
AuthorsXu, JikaiAuthor
Wang, ChenxiAuthor
Tian, YanhongAuthor
Wu, BinAuthor
Wang, ShangAuthor
Zhang, HeAuthor
Year2018 (November)Volume459
PublisherElsevier BV
DOIdoi:10.1016/j.apsusc.2018.08.031Search in ResearchGate
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Mindat Ref. ID9935614Long-form Identifiermindat:1:5:9935614:7
GUID0
Full ReferenceXu, Jikai, Wang, Chenxi, Tian, Yanhong, Wu, Bin, Wang, Shang, Zhang, He (2018) Glass-on-LiNbO3 heterostructure formed via a two-step plasma activated low-temperature direct bonding method. Applied Surface Science, 459. 621-629 doi:10.1016/j.apsusc.2018.08.031
Plain TextXu, Jikai, Wang, Chenxi, Tian, Yanhong, Wu, Bin, Wang, Shang, Zhang, He (2018) Glass-on-LiNbO3 heterostructure formed via a two-step plasma activated low-temperature direct bonding method. Applied Surface Science, 459. 621-629 doi:10.1016/j.apsusc.2018.08.031
In(n.d.) Applied Surface Science Vol. 459. Elsevier BV

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Xu, Jikai, Wang, Chenxi, Wang, Te, Liu, Yannan, Tian, Yanhong (2018) Direct bonding of silicon and quartz glass using VUV/O3 activation and a multistep low-temperature annealing process. Applied Surface Science, 453. 416-422 doi:10.1016/j.apsusc.2018.05.109
Xu, Jikai, Wang, Chenxi, Wu, Bin, Tian, Yanhong, Qi, Xiaoyun (2018) Communication—Defect-Free Direct Bonding for High-Performance Glass-On-LiNbO3 Devices. Journal of the Electrochemical Society, 165. doi:10.1149/2.0871814jes
Xu, Jikai, Wang, Chenxi, Zhang, Runbo, Cheng, Ji, Li, Ge, Xiang, Junshan, Tian, Yanhong (2019) VUV/O3 activated direct heterogeneous bonding towards high-performance LiNbO3-based optical devices. Applied Surface Science, 495. 143576pp. doi:10.1016/j.apsusc.2019.143576
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