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Tillmann, Wolfgang, Lopes Dias, Nelson Filipe, Stangier, Dominic, Bayer, Manfred, Moldenhauer, Henning, Debus, Jörg, Schmitz, Marie, Berges, Ulf, Westphal, Carsten (2019) Interaction effects of cathode power, bias voltage, and mid-frequency on the structural and mechanical properties of sputtered amorphous carbon films. Applied Surface Science, 487. 857-867 doi:10.1016/j.apsusc.2019.05.131

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Reference TypeJournal (article/letter/editorial)
TitleInteraction effects of cathode power, bias voltage, and mid-frequency on the structural and mechanical properties of sputtered amorphous carbon films
JournalApplied Surface Science
AuthorsTillmann, WolfgangAuthor
Lopes Dias, Nelson FilipeAuthor
Stangier, DominicAuthor
Bayer, ManfredAuthor
Moldenhauer, HenningAuthor
Debus, JörgAuthor
Schmitz, MarieAuthor
Berges, UlfAuthor
Westphal, CarstenAuthor
Year2019 (September)Volume487
PublisherElsevier BV
DOIdoi:10.1016/j.apsusc.2019.05.131Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID9938445Long-form Identifiermindat:1:5:9938445:0
GUID0
Full ReferenceTillmann, Wolfgang, Lopes Dias, Nelson Filipe, Stangier, Dominic, Bayer, Manfred, Moldenhauer, Henning, Debus, Jörg, Schmitz, Marie, Berges, Ulf, Westphal, Carsten (2019) Interaction effects of cathode power, bias voltage, and mid-frequency on the structural and mechanical properties of sputtered amorphous carbon films. Applied Surface Science, 487. 857-867 doi:10.1016/j.apsusc.2019.05.131
Plain TextTillmann, Wolfgang, Lopes Dias, Nelson Filipe, Stangier, Dominic, Bayer, Manfred, Moldenhauer, Henning, Debus, Jörg, Schmitz, Marie, Berges, Ulf, Westphal, Carsten (2019) Interaction effects of cathode power, bias voltage, and mid-frequency on the structural and mechanical properties of sputtered amorphous carbon films. Applied Surface Science, 487. 857-867 doi:10.1016/j.apsusc.2019.05.131
In(n.d.) Applied Surface Science Vol. 487. Elsevier BV

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