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Huang, Yigang, Tang, Fei, Guo, Zheng, Wang, Xiaohao (2019) Accelerated ICP etching of 6H-SiC by femtosecond laser modification. Applied Surface Science, 488. 853-864 doi:10.1016/j.apsusc.2019.05.262

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Reference TypeJournal (article/letter/editorial)
TitleAccelerated ICP etching of 6H-SiC by femtosecond laser modification
JournalApplied Surface Science
AuthorsHuang, YigangAuthor
Tang, FeiAuthor
Guo, ZhengAuthor
Wang, XiaohaoAuthor
Year2019 (September)Volume488
PublisherElsevier BV
DOIdoi:10.1016/j.apsusc.2019.05.262Search in ResearchGate
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Mindat Ref. ID9938569Long-form Identifiermindat:1:5:9938569:9
GUID0
Full ReferenceHuang, Yigang, Tang, Fei, Guo, Zheng, Wang, Xiaohao (2019) Accelerated ICP etching of 6H-SiC by femtosecond laser modification. Applied Surface Science, 488. 853-864 doi:10.1016/j.apsusc.2019.05.262
Plain TextHuang, Yigang, Tang, Fei, Guo, Zheng, Wang, Xiaohao (2019) Accelerated ICP etching of 6H-SiC by femtosecond laser modification. Applied Surface Science, 488. 853-864 doi:10.1016/j.apsusc.2019.05.262
In(n.d.) Applied Surface Science Vol. 488. Elsevier BV

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