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HENRY, F., ARMAS, B., BALAT, M., BERJOAN, R., COMBESCURE, C. (1993) A study of AlN-Si3N4 codeposits using the L.P.C.V.D. technique. Le Journal de Physique IV, 3. doi:10.1051/jp4:1993372

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Reference TypeJournal (article/letter/editorial)
TitleA study of AlN-Si3N4 codeposits using the L.P.C.V.D. technique
JournalLe Journal de Physique IV
AuthorsHENRY, F.Author
ARMAS, B.Author
BALAT, M.Author
BERJOAN, R.Author
COMBESCURE, C.Author
Year1993 (August)Volume3
PublisherEDP Sciences
DOIdoi:10.1051/jp4:1993372Search in ResearchGate
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Mindat Ref. ID10296082Long-form Identifiermindat:1:5:10296082:4
GUID0
Full ReferenceHENRY, F., ARMAS, B., BALAT, M., BERJOAN, R., COMBESCURE, C. (1993) A study of AlN-Si3N4 codeposits using the L.P.C.V.D. technique. Le Journal de Physique IV, 3. doi:10.1051/jp4:1993372
Plain TextHENRY, F., ARMAS, B., BALAT, M., BERJOAN, R., COMBESCURE, C. (1993) A study of AlN-Si3N4 codeposits using the L.P.C.V.D. technique. Le Journal de Physique IV, 3. doi:10.1051/jp4:1993372
In(n.d.) Le Journal de Physique IV Vol. 3. EDP Sciences

See Also

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Henry, F., Armas, B., Combescure, C., Thenegal, D., Flamand, R. (1995) Chemical Vapour Deposition of AIN-Si3N4 Codeposits. Le Journal de Physique IV, 5. doi:10.1051/jphyscol:1995593
LABATUT, C., COMBESCURE, C., ARMAS, B. (1993) LPCVD of Al2O3 layers using a hot-wall reactor. Le Journal de Physique IV, 3. doi:10.1051/jp4:1993381
HENRY, F., MARTI, P., CASAUX, Y., COMBESCURE, C., FIGUERAS, A., MADIGOU, V., RODRIGUEZ-CLEMENTE, R., MAZEL, A., SEVELY, J., ARMAS, B. (1993) LPCVD of SiC layers in a hot-wall reactor using TMS precursor. Le Journal de Physique IV, 3. doi:10.1051/jp4:1993345
Marti, P., Henry, F., Mazel, A., Armas, B., Sevely, J. (1995) Transmission Electron Microscopy Studies of (AIN-Si3N4) Codeposits Obtained by LPCVD. Le Journal de Physique IV, 5. doi:10.1051/jphyscol:19955107
ASPAR, B., BERJOAN, R., ARMAS, B., PERARNAU, D. (1993) AES characterization and depth profiles measurements of AIN thin films on SiO2 substrates. Le Journal de Physique IV, 3. doi:10.1051/jp4:1993321
ASPAR, B., ARMAS, B., COMBESCURE, C., THENEGAL, D. (1991) CHEMICAL VAPOUR DEPOSITION OF THE Al-O-N SYSTEM. Le Journal de Physique IV, 2. doi:10.1051/jp4:1991280
Armas, B., de Icaza Herrera, M., Combescure, C., Sibieude, F., Thenegal, D. (1999) Low-pressure chemical vapour deposition of mullite coatings in a cold-wall reactor. Le Journal de Physique IV, 9. doi:10.1051/jp4:1999849
CHEHOUANI, H., BENET, S., ARMAS, B., COMBESCURE, C., FIGUERAS, A., GARELIK, S. (1993) Transport phenomena in a cold wall vertical reactor for metalorganic vapor phase growth of β-SiC layers. Le Journal de Physique IV, 3. doi:10.1051/jp4:1993316
CHEHOUANI, H., ARMAS, B., COMBESCURE, C., BENET, S ., BRUNET, S. (1991) EXPERIMENTAL STUDY AND NUMERICAL SIMULATION OF HYDRODYNAMICS AND HEAT TRANSFER IN A COLD-WALL CVD REACTOR. Le Journal de Physique IV, 2. doi:10.1051/jp4:1991221
DUCARROIR, M., ZHANG, W., BERJOAN, R. (1993) SiCN coatings prepared by PACVD from TMS-NH3-Ar system on steel. Le Journal de Physique IV, 3. doi:10.1051/jp4:1993333
CHEHOUANI, H., BENET, S., BRUNET, S., ARMAS, B. (1993) Heat transfer studies in cold CVD reactors using holographic interferometry. Le Journal de Physique IV, 3. doi:10.1051/jp4:1993310
 
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