Hong, Hyungseok, Kim, Seokhoon, Woo, Sanghyun, Kim, Hyungchul, Kim, Honggyu, Jeong, Wooho, Jeon, Sunyeol, Bang, Seokhwan, Lee, Seungjun, Jeon, Hyeongtag (2008) Characteristics of Atomic-Layer-Deposited HfO2 Films by Using a Remote Plasma on Pre-Deposited Hf Metal Layer. Journal of the Korean Physical Society, 52 (4). 1114-1119 doi:10.3938/jkps.52.1114
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Characteristics of Atomic-Layer-Deposited HfO2 Films by Using a Remote Plasma on Pre-Deposited Hf Metal Layer | ||
| Journal | Journal of the Korean Physical Society | ||
| Authors | Hong, Hyungseok | Author | |
| Kim, Seokhoon | Author | ||
| Woo, Sanghyun | Author | ||
| Kim, Hyungchul | Author | ||
| Kim, Honggyu | Author | ||
| Jeong, Wooho | Author | ||
| Jeon, Sunyeol | Author | ||
| Bang, Seokhwan | Author | ||
| Lee, Seungjun | Author | ||
| Jeon, Hyeongtag | Author | ||
| Year | 2008 (April 15) | Volume | 52 |
| Issue | 4 | ||
| Publisher | Korean Physical Society | ||
| DOI | doi:10.3938/jkps.52.1114Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 11232855 | Long-form Identifier | mindat:1:5:11232855:3 |
| GUID | 0 | ||
| Full Reference | Hong, Hyungseok, Kim, Seokhoon, Woo, Sanghyun, Kim, Hyungchul, Kim, Honggyu, Jeong, Wooho, Jeon, Sunyeol, Bang, Seokhwan, Lee, Seungjun, Jeon, Hyeongtag (2008) Characteristics of Atomic-Layer-Deposited HfO2 Films by Using a Remote Plasma on Pre-Deposited Hf Metal Layer. Journal of the Korean Physical Society, 52 (4). 1114-1119 doi:10.3938/jkps.52.1114 | ||
| Plain Text | Hong, Hyungseok, Kim, Seokhoon, Woo, Sanghyun, Kim, Hyungchul, Kim, Honggyu, Jeong, Wooho, Jeon, Sunyeol, Bang, Seokhwan, Lee, Seungjun, Jeon, Hyeongtag (2008) Characteristics of Atomic-Layer-Deposited HfO2 Films by Using a Remote Plasma on Pre-Deposited Hf Metal Layer. Journal of the Korean Physical Society, 52 (4). 1114-1119 doi:10.3938/jkps.52.1114 | ||
| In | (2008, April) Journal of the Korean Physical Society Vol. 52 (4) Korean Physical Society | ||
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