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Tanaka, Akira, Katsuno, Hironobu (2009) Formation of Bare Porous Surface on 6H-SiC Substrates by Photo-Electrochemical Etching. Japanese Journal of Applied Physics, 48 (12) 120217 doi:10.1143/jjap.48.120217

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Reference TypeJournal (article/letter/editorial)
TitleFormation of Bare Porous Surface on 6H-SiC Substrates by Photo-Electrochemical Etching
JournalJapanese Journal of Applied Physics
AuthorsTanaka, AkiraAuthor
Katsuno, HironobuAuthor
Year2009 (December 7)Volume48
Issue12
PublisherJapan Society of Applied Physics
DOIdoi:10.1143/jjap.48.120217Search in ResearchGate
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Mindat Ref. ID15033145Long-form Identifiermindat:1:5:15033145:4
GUID0
Full ReferenceTanaka, Akira, Katsuno, Hironobu (2009) Formation of Bare Porous Surface on 6H-SiC Substrates by Photo-Electrochemical Etching. Japanese Journal of Applied Physics, 48 (12) 120217 doi:10.1143/jjap.48.120217
Plain TextTanaka, Akira, Katsuno, Hironobu (2009) Formation of Bare Porous Surface on 6H-SiC Substrates by Photo-Electrochemical Etching. Japanese Journal of Applied Physics, 48 (12) 120217 doi:10.1143/jjap.48.120217
In(2009, December) Japanese Journal of Applied Physics Vol. 48 (12) Japan Society of Applied Physics

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Tanaka, Akira, Ota, Yuichi, Katsuno, Hironobu (2007) Current–Voltage Characteristics of p+–n SiC Junctions Fabricated by Low-Temperature Liquid Phase Epitaxy. Japanese Journal of Applied Physics, 46 (8) 5131-5132 doi:10.1143/jjap.46.5131
Tanaka, Akira, Katsuno, Hironobu (2011) Void-Free Cuprous Oxide Tube Prepared by Thermal Oxidation on Outside of Copper Tube. Japanese Journal of Applied Physics, 50. 110205 doi:10.1143/jjap.50.110205
Omiya, Takuma, Tanaka, Akira, Shimomura, Masaru (2012) Morphological Study on Porous Silicon Carbide Membrane Fabricated by Double-Step Electrochemical Etching. Japanese Journal of Applied Physics, 51. 75501 doi:10.1143/jjap.51.075501
Tanaka, Akira, Katsuno, Hironobu (2006) Heavily p-Type Silicon Carbide Thick Layer Growth by Low-Temperature Liquid Phase Epitaxy. Japanese Journal of Applied Physics, 45 (1) 32-35 doi:10.1143/jjap.45.32
Tanaka, Akira, Katsuno, Hironobu (2011) Void-Free Cuprous Oxide Tube Prepared by Thermal Oxidation on Outside of Copper Tube. Japanese Journal of Applied Physics, 50 (11) 110205 doi:10.7567/jjap.50.110205
Sukegawa, Tokuzo, Udono, Haruhiko, Kimura, Masakazu, Katsuno, Hironobu, Tanaka, Akira (1993) Conversion from GaAs to GaAsP by Annealing a GaAs Layer on GaP in Ga-As-P Solution. Japanese Journal of Applied Physics, 32. doi:10.1143/jjap.32.l1164
Tanaka, Akira, Ataka, Tatsuya, Ohkura, Eiji, Katsuno, Hironobu (2004) Growth Modes of Silicon Carbide in Low-Temperature Liquid Phase Epitaxy. Japanese Journal of Applied Physics, 43 (11) 7670-7671 doi:10.1143/jjap.43.7670
Nishiguchi, Taro, Ohshima, Satoru, Nishino, Shigehiro (2003) Thermal Etching of 6H–SiC Substrate Surface. Japanese Journal of Applied Physics, 42. 1533-1537 doi:10.1143/jjap.42.1533
Nishino, Shigehiro, Ibaraki, Akira, Matsunami, Hiroyuki, Tanaka, Tetsuro (1980) Blue-Emitting Diodes of 6H-SiC Prepared by Chemical Vapor Deposition. Japanese Journal of Applied Physics, 19 (7) doi:10.1143/jjap.19.l353
Kato, Masashi, Ichimura, Masaya, Arai, Eisuke, Ramasamy, Perumalsamy (2003) Electrochemical Etching of 6H-SiC Using Aqueous KOH Solutions with Low Surface Roughness. Japanese Journal of Applied Physics, 42. 4233-4236 doi:10.1143/jjap.42.4233
Takazawa, Akira, Tamura, Tetsuro, Yamada, Masao (1993) Porous β-SiC Fabrication by Electrochemical Anodization. Japanese Journal of Applied Physics, 32. 3148-3149 doi:10.1143/jjap.32.3148
 
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