Shima, Shohei, Wada, Yutaka, Tokushige, Katsuhiko, Fukunaga, Akira, Tsujimura, Manabu (2010) Analysis on Copper Photocorrosion Induced by Illuminance in Chemical Mechanical Planarization Equipment Using Photodiode and Quartz Crystal Microbalance. Japanese Journal of Applied Physics, 49 (5) 5 doi:10.1143/jjap.49.05ff05
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Analysis on Copper Photocorrosion Induced by Illuminance in Chemical Mechanical Planarization Equipment Using Photodiode and Quartz Crystal Microbalance | ||
| Journal | Japanese Journal of Applied Physics | ||
| Authors | Shima, Shohei | Author | |
| Wada, Yutaka | Author | ||
| Tokushige, Katsuhiko | Author | ||
| Fukunaga, Akira | Author | ||
| Tsujimura, Manabu | Author | ||
| Year | 2010 (May 20) | Volume | 49 |
| Issue | 5 | ||
| Publisher | Japan Society of Applied Physics | ||
| DOI | doi:10.1143/jjap.49.05ff05Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 15035566 | Long-form Identifier | mindat:1:5:15035566:5 |
| GUID | 0 | ||
| Full Reference | Shima, Shohei, Wada, Yutaka, Tokushige, Katsuhiko, Fukunaga, Akira, Tsujimura, Manabu (2010) Analysis on Copper Photocorrosion Induced by Illuminance in Chemical Mechanical Planarization Equipment Using Photodiode and Quartz Crystal Microbalance. Japanese Journal of Applied Physics, 49 (5) 5 doi:10.1143/jjap.49.05ff05 | ||
| Plain Text | Shima, Shohei, Wada, Yutaka, Tokushige, Katsuhiko, Fukunaga, Akira, Tsujimura, Manabu (2010) Analysis on Copper Photocorrosion Induced by Illuminance in Chemical Mechanical Planarization Equipment Using Photodiode and Quartz Crystal Microbalance. Japanese Journal of Applied Physics, 49 (5) 5 doi:10.1143/jjap.49.05ff05 | ||
| In | (2010, May) Japanese Journal of Applied Physics Vol. 49 (5) Japan Society of Applied Physics | ||
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