Hattori, Kei, Osato, Masaaki, Maeda, Takeshi, Okumura, Katsuya, Sekine, Makoto, Hori, Masaru (2011) High-Performance Decomposition and Fixation of Dry Etching Exhaust Perfluoro-Compound Gases and Study of Their Mechanism. Japanese Journal of Applied Physics, 50 (11) 117301 doi:10.7567/jjap.50.117301
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | High-Performance Decomposition and Fixation of Dry Etching Exhaust Perfluoro-Compound Gases and Study of Their Mechanism | ||
| Journal | Japanese Journal of Applied Physics | ||
| Authors | Hattori, Kei | Author | |
| Osato, Masaaki | Author | ||
| Maeda, Takeshi | Author | ||
| Okumura, Katsuya | Author | ||
| Sekine, Makoto | Author | ||
| Hori, Masaru | Author | ||
| Year | 2011 (November 1) | Volume | 50 |
| Issue | 11 | ||
| Publisher | Japan Society of Applied Physics | ||
| DOI | doi:10.7567/jjap.50.117301Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 15037215 | Long-form Identifier | mindat:1:5:15037215:0 |
| GUID | 0 | ||
| Full Reference | Hattori, Kei, Osato, Masaaki, Maeda, Takeshi, Okumura, Katsuya, Sekine, Makoto, Hori, Masaru (2011) High-Performance Decomposition and Fixation of Dry Etching Exhaust Perfluoro-Compound Gases and Study of Their Mechanism. Japanese Journal of Applied Physics, 50 (11) 117301 doi:10.7567/jjap.50.117301 | ||
| Plain Text | Hattori, Kei, Osato, Masaaki, Maeda, Takeshi, Okumura, Katsuya, Sekine, Makoto, Hori, Masaru (2011) High-Performance Decomposition and Fixation of Dry Etching Exhaust Perfluoro-Compound Gases and Study of Their Mechanism. Japanese Journal of Applied Physics, 50 (11) 117301 doi:10.7567/jjap.50.117301 | ||
| In | (2011, November) Japanese Journal of Applied Physics Vol. 50 (11) Japan Society of Applied Physics | ||
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