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Nakao, Setsuo, Soga, Tetsuo, Sonoda, Tsutomu, Asada, Tokuhiro, Kishi, Naoki (2012) Optical and Electrical Properties of Nitrogen-Doped Diamond-Like Carbon Films Prepared by a Bipolar-Type Plasma-Based Ion Implantation. Japanese Journal of Applied Physics, 51 (1) 1 doi:10.7567/jjap.51.01ac04

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Reference TypeJournal (article/letter/editorial)
TitleOptical and Electrical Properties of Nitrogen-Doped Diamond-Like Carbon Films Prepared by a Bipolar-Type Plasma-Based Ion Implantation
JournalJapanese Journal of Applied Physics
AuthorsNakao, SetsuoAuthor
Soga, TetsuoAuthor
Sonoda, TsutomuAuthor
Asada, TokuhiroAuthor
Kishi, NaokiAuthor
Year2012 (January 1)Volume51
Issue1
PublisherJapan Society of Applied Physics
DOIdoi:10.7567/jjap.51.01ac04Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID15041606Long-form Identifiermindat:1:5:15041606:9
GUID0
Full ReferenceNakao, Setsuo, Soga, Tetsuo, Sonoda, Tsutomu, Asada, Tokuhiro, Kishi, Naoki (2012) Optical and Electrical Properties of Nitrogen-Doped Diamond-Like Carbon Films Prepared by a Bipolar-Type Plasma-Based Ion Implantation. Japanese Journal of Applied Physics, 51 (1) 1 doi:10.7567/jjap.51.01ac04
Plain TextNakao, Setsuo, Soga, Tetsuo, Sonoda, Tsutomu, Asada, Tokuhiro, Kishi, Naoki (2012) Optical and Electrical Properties of Nitrogen-Doped Diamond-Like Carbon Films Prepared by a Bipolar-Type Plasma-Based Ion Implantation. Japanese Journal of Applied Physics, 51 (1) 1 doi:10.7567/jjap.51.01ac04
In(2012, January) Japanese Journal of Applied Physics Vol. 51 (1) Japan Society of Applied Physics

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Nakao, Setsuo, Soga, Tetsuo, Sonoda, Tsutomu, Asada, Tokuhiro, Kishi, Naoki (2012) Optical and Electrical Properties of Nitrogen-Doped Diamond-Like Carbon Films Prepared by a Bipolar-Type Plasma-Based Ion Implantation. Japanese Journal of Applied Physics, 51 (1) 1 doi:10.1143/jjap.51.01ac04
Nakao, Setsuo, Kinomura, Atsushi, Sonoda, Tsutomu (2013) Nitrogen implantation into diamond-like carbon films prepared by bipolar-type plasma based ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 307. 333-339 doi:10.1016/j.nimb.2012.12.088
Nakao, Setsuo, Matsumoto, Akihiro, Soga, Tetsuo, Kishi, Naoki (2013) Effects of H2 gas addition into process and H ion implantation on the microstructure of hydrogenated amorphous carbon films prepared by bipolar-type plasma based ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 307. 328-332 doi:10.1016/j.nimb.2012.11.082
Nakao, S, Sonoda, T (2013) Effects of electrical conductivity of substrate materials on microstructure of diamond-like carbon films prepared by bipolar-type plasma based ion implantation. Journal of Physics: Conference Series, 417. 12062pp. doi:10.1088/1742-6596/417/1/012062
Sonoda, Tsutomu, Nakao, Setsuo, Ikeyama, Masami (2012) Preparation of MAX-Phase-Containing Ti–Si–C Thin Films by Magnetron Sputtering Using Elemental Targets. Japanese Journal of Applied Physics, 51 (1) 1 doi:10.7567/jjap.51.01ac06
Nakao, Setsuo (2009) Effects of working pressure on the deposition of diamond-like carbon films prepared by bipolar-type plasma based ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 267 (8). 1684-1687 doi:10.1016/j.nimb.2009.01.103
Sonoda, Tsutomu, Nakao, Setsuo, Ikeyama, Masami (2012) Preparation of MAX-Phase-Containing Ti–Si–C Thin Films by Magnetron Sputtering Using Elemental Targets. Japanese Journal of Applied Physics, 51 (1) 1 doi:10.1143/jjap.51.01ac06
Nakazawa, Hideki, Okuno, Saori, Miura, Soushi, Kamata, Ryosuke (2012) Hydrogen Effects on the Properties of Silicon/Nitrogen-Coincorporated Diamond-Like Carbon Films Prepared by Plasma-Enhanced Chemical Vapor Deposition. Japanese Journal of Applied Physics, 51 (7) 75801 doi:10.7567/jjap.51.075801
Nakao, S., Choi, J., Kato, T. (2008) Microstructure of diamond-like carbon films prepared using acetylene and toluene by bipolar-type plasma based ion implantation. physica status solidi (c), 5 (4). 973-976 doi:10.1002/pssc.200778308
Nakazawa, Hideki, Miura, Soushi, Kamata, Ryosuke, Okuno, Saori, Enta, Yoshiharu, Suemitsu, Maki, Abe, Toshimi (2012) Characteristics of Silicon/Nitrogen-Incorporated Diamond-Like Carbon Films Prepared by Plasma-Enhanced Chemical Vapor Deposition. Japanese Journal of Applied Physics, 51 (1) 15603 doi:10.7567/jjap.51.015603
Choudhury, Md. Shamimul Haque, Kishi, Naoki, Soga, Tetsuo (2016) Performance analysis of electrophorically deposited ZnO-based dye-sensitized solar cells prepared using compression at elevated temperature along with postannealing. Japanese Journal of Applied Physics, 55 (1) 1 doi:10.7567/jjap.55.01aa16
 
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