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(2016) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 55 (6) 6 doi:10.7567/jjap.55.06j001

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Reference TypeJournal (article/letter/editorial)
TitleAdvanced Metallization for ULSI Applications
JournalJapanese Journal of Applied Physics
Year2016 (June 1)Volume55
Issue6
PublisherJapan Society of Applied Physics
DOIdoi:10.7567/jjap.55.06j001Search in ResearchGate
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Mindat Ref. ID15046545Long-form Identifiermindat:1:5:15046545:6
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Full Reference(2016) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 55 (6) 6 doi:10.7567/jjap.55.06j001
Plain Text(2016) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 55 (6) 6 doi:10.7567/jjap.55.06j001
In(2016, June) Japanese Journal of Applied Physics Vol. 55 (6) Japan Society of Applied Physics

See Also

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(2015) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 54 (5) 50 doi:10.7567/jjap.54.05e001
(2017) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 56 (7) 7 doi:10.7567/jjap.56.07k001
(2018) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 57 (7) 7 doi:10.7567/jjap.57.07m001
Koike, Junichi (2014) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 53 (5) 5 doi:10.7567/jjap.53.05g001
(2019) Advanced metallization for ULSI applications. Japanese Journal of Applied Physics, 58. doi:10.7567/1347-4065/ab2533
(2023) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 62. doi:10.35848/1347-4065/acd5db
(2022) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 61. doi:10.35848/1347-4065/ac6c14
(2020) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 59. doi:10.35848/1347-4065/ab949d
(2025) Advanced Metallization for ULSI Applications 2024. Japanese Journal of Applied Physics, 64 (7). doi:10.35848/1347-4065/add351
Lin, Chon-Hsin (2016) New Cu(TiBNx) copper alloy films for industrial applications. Japanese Journal of Applied Physics, 55 (6) 6 doi:10.7567/jjap.55.06jd02
(2016) Dry Process. Japanese Journal of Applied Physics, 55 (6) 6 doi:10.7567/jjap.55.06h001
 
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