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(2015) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 54 (5) 50 doi:10.7567/jjap.54.05e001

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Reference TypeJournal (article/letter/editorial)
TitleAdvanced Metallization for ULSI Applications
JournalJapanese Journal of Applied Physics
Year2015 (May 1)Volume54
Issue5
PublisherJapan Society of Applied Physics
DOIdoi:10.7567/jjap.54.05e001Search in ResearchGate
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Mindat Ref. ID15044911Long-form Identifiermindat:1:5:15044911:1
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Full Reference(2015) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 54 (5) 50 doi:10.7567/jjap.54.05e001
Plain Text(2015) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 54 (5) 50 doi:10.7567/jjap.54.05e001
In(2015, May) Japanese Journal of Applied Physics Vol. 54 (5) Japan Society of Applied Physics

See Also

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Koike, Junichi (2014) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 53 (5) 5 doi:10.7567/jjap.53.05g001
(2016) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 55 (6) 6 doi:10.7567/jjap.55.06j001
(2017) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 56 (7) 7 doi:10.7567/jjap.56.07k001
(2018) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 57 (7) 7 doi:10.7567/jjap.57.07m001
(2019) Advanced metallization for ULSI applications. Japanese Journal of Applied Physics, 58. doi:10.7567/1347-4065/ab2533
(2023) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 62. doi:10.35848/1347-4065/acd5db
(2022) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 61. doi:10.35848/1347-4065/ac6c14
(2020) Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 59. doi:10.35848/1347-4065/ab949d
(2025) Advanced Metallization for ULSI Applications 2024. Japanese Journal of Applied Physics, 64 (7). doi:10.35848/1347-4065/add351
Lin, Chon-Hsin (2015) New Cu(GeNx) film in barrierless metallization for LED heat dissipation. Japanese Journal of Applied Physics, 54 (5) 5 doi:10.7567/jjap.54.05ed04
(2024) Advanced Metallization for ULSI Applications 2023 (ADMETA2023) Japanese Journal of Applied Physics, 63 (8) 80001 doi:10.35848/1347-4065/ad5e8c
 
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