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Bergunde, T., Dauelsberg, M., Kadinski, L., Makarov, Yu.N., Weyers, M., Schmitz, D., Strauch, G., Jürgensen, H. (1997) Heat transfer and mass transport in a multiwafer MOVPE reactor: modelling and experimental studies. Journal of Crystal Growth, 170 (1). 66-71 doi:10.1016/s0022-0248(96)00551-9

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Reference TypeJournal (article/letter/editorial)
TitleHeat transfer and mass transport in a multiwafer MOVPE reactor: modelling and experimental studies
JournalJournal of Crystal Growth
AuthorsBergunde, T.Author
Dauelsberg, M.Author
Kadinski, L.Author
Makarov, Yu.N.Author
Weyers, M.Author
Schmitz, D.Author
Strauch, G.Author
Jürgensen, H.Author
Year1997 (January)Volume170
Issue1
PublisherElsevier BV
DOIdoi:10.1016/s0022-0248(96)00551-9Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID2831337Long-form Identifiermindat:1:5:2831337:3
GUID0
Full ReferenceBergunde, T., Dauelsberg, M., Kadinski, L., Makarov, Yu.N., Weyers, M., Schmitz, D., Strauch, G., Jürgensen, H. (1997) Heat transfer and mass transport in a multiwafer MOVPE reactor: modelling and experimental studies. Journal of Crystal Growth, 170 (1). 66-71 doi:10.1016/s0022-0248(96)00551-9
Plain TextBergunde, T., Dauelsberg, M., Kadinski, L., Makarov, Yu.N., Weyers, M., Schmitz, D., Strauch, G., Jürgensen, H. (1997) Heat transfer and mass transport in a multiwafer MOVPE reactor: modelling and experimental studies. Journal of Crystal Growth, 170 (1). 66-71 doi:10.1016/s0022-0248(96)00551-9
In(1997, January) Journal of Crystal Growth Vol. 170 (1) Elsevier BV

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Bergunde, T., Dauelsberg, M., Kadinski, L., Makarov, Yu.N., Yuferev, V.S., Schmitz, D., Strauch, G., Jürgensen, H. (1997) Process optimisation of MOVPE growth by numerical modelling of transport phenomena including thermal radiation. Journal of Crystal Growth, 180 (3). 660-669 doi:10.1016/s0022-0248(97)00260-1
Dauelsberg, M., Kadinski, L., Makarov, Yu.N., Bergunde, T., Strauch, G., Weyers, M. (2000) Modeling and experimental verification of transport and deposition behavior during MOVPE of Ga1-xInxP in the Planetary Reactor. Journal of Crystal Growth, 208 (1). 85-92 doi:10.1016/s0022-0248(99)00447-9
Bergunde, T., Durst, F., Kadinski, L., Makarov, Yu.N., Schäfer, M., Weyers, M. (1994) Modelling of growth in a 5 X 3 inch multiwafer metalorganic vapour phase epitaxy reactor. Journal of Crystal Growth, 145 (1). 630-635 doi:10.1016/0022-0248(94)91118-5
Bergunde, T., Gutsche, D., Kadinski, L., Makarov, Yu., Weyers, M. (1995) Transport and reaction behaviour in Aix-2000 planetary metalorganic vapour phase epitaxy reactor. Journal of Crystal Growth, 146 (1). 564-569 doi:10.1016/0022-0248(94)00573-7
Kurpas, P., Rumberg, A., Weyers, M., Knorr, K., Bergunde, T., Sato, M., Richter, W. (1997) Growth monitoring by reflectance anisotropy spectroscopy in MOVPE reactors for device fabrication. Journal of Crystal Growth, 170 (1). 203-207 doi:10.1016/s0022-0248(96)00622-7
Durst, F., Kadinski, L., Makarov, Yu.N., Schäfer, M., Vasil'ev, M.G., Yuferev, V.S. (1997) Advanced mathematical models for simulation of radiative heat transfer in CVD reactors. Journal of Crystal Growth, 172 (3). 389-395 doi:10.1016/s0022-0248(96)00760-9
Schmitz, D., Lengeling, G., Strauch, G., Hergeth, J., Jürgensen, H. (1992) GaInP multiwafer growth by LP-MOVPE for HBTs, lasers, LEDs or solar cells. Journal of Crystal Growth, 124 (1). 278-285 doi:10.1016/0022-0248(92)90472-u
Beccard, R, Protzmann, H, Schmitz, D, Strauch, G, Heuken, M, Juergensen, H (1999) A novel reactor concept for multiwafer growth of III–V semiconductors. Journal of Crystal Growth, 198. 1049-1055 doi:10.1016/s0022-0248(98)01042-2
Beccard, R., Lengeling, G., Schmitz, D., Gigase, Y., Jürgensen, H. (1997) Replacement of hydrides by TBAs and TBP for the growth of various III–V materials in production scale MOVPE reactors. Journal of Crystal Growth, 170 (1). 97-102 doi:10.1016/s0022-0248(96)00625-2
Selder, M., Kadinski, L., Makarov, Yu., Durst, F., Wellmann, P., Straubinger, T., Hofmann, D., Karpov, S., Ramm, M. (2000) Global numerical simulation of heat and mass transfer for SiC bulk crystal growth by PVT. Journal of Crystal Growth, 211 (1). 333-338 doi:10.1016/s0022-0248(99)00853-2
Knauf, J., Schmitz, D., Strauch, G., Jürgensen, H., Heyen, M., Melas, A. (1988) Comparison of ethyldimethylindium (EDMIn) and trimethylindium (TMIn) for GaInAs and InP growth by LP-MOVPE. Journal of Crystal Growth, 93 (1). 34-40 doi:10.1016/0022-0248(88)90502-7
 
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