de Oliveira Neto, Antonio M., Schreiner, Wido H., Justo, João F., de Oliveira, Alexandre M., Rangel, Elidiane C., Durrant, Steven F. (2019) Characterization of amorphous carbon films by PECVD and plasma ion implantation: The role of fluorine and sulfur doping. Materials Chemistry and Physics, 227. 170-175 doi:10.1016/j.matchemphys.2019.02.008
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Characterization of amorphous carbon films by PECVD and plasma ion implantation: The role of fluorine and sulfur doping | ||
Journal | Materials Chemistry and Physics | ||
Authors | de Oliveira Neto, Antonio M. | Author | |
Schreiner, Wido H. | Author | ||
Justo, João F. | Author | ||
de Oliveira, Alexandre M. | Author | ||
Rangel, Elidiane C. | Author | ||
Durrant, Steven F. | Author | ||
Year | 2019 (April) | Volume | 227 |
Publisher | Elsevier BV | ||
DOI | doi:10.1016/j.matchemphys.2019.02.008Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 3065332 | Long-form Identifier | mindat:1:5:3065332:6 |
GUID | 0 | ||
Full Reference | de Oliveira Neto, Antonio M., Schreiner, Wido H., Justo, João F., de Oliveira, Alexandre M., Rangel, Elidiane C., Durrant, Steven F. (2019) Characterization of amorphous carbon films by PECVD and plasma ion implantation: The role of fluorine and sulfur doping. Materials Chemistry and Physics, 227. 170-175 doi:10.1016/j.matchemphys.2019.02.008 | ||
Plain Text | de Oliveira Neto, Antonio M., Schreiner, Wido H., Justo, João F., de Oliveira, Alexandre M., Rangel, Elidiane C., Durrant, Steven F. (2019) Characterization of amorphous carbon films by PECVD and plasma ion implantation: The role of fluorine and sulfur doping. Materials Chemistry and Physics, 227. 170-175 doi:10.1016/j.matchemphys.2019.02.008 | ||
In | (2019) Materials Chemistry and Physics Vol. 227. Elsevier BV |
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