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Goedheer, W.J., Meijer, P.M. (1993) Numerical simulation of RF discharges for plasma processing. Journal of Nuclear Materials, 200 (3). 282-290 doi:10.1016/0022-3115(93)90296-b

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Reference TypeJournal (article/letter/editorial)
TitleNumerical simulation of RF discharges for plasma processing
JournalJournal of Nuclear Materials
AuthorsGoedheer, W.J.Author
Meijer, P.M.Author
Year1993 (May)Volume200
Issue3
PublisherElsevier BV
DOIdoi:10.1016/0022-3115(93)90296-bSearch in ResearchGate
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Mindat Ref. ID4150483Long-form Identifiermindat:1:5:4150483:1
GUID0
Full ReferenceGoedheer, W.J., Meijer, P.M. (1993) Numerical simulation of RF discharges for plasma processing. Journal of Nuclear Materials, 200 (3). 282-290 doi:10.1016/0022-3115(93)90296-b
Plain TextGoedheer, W.J., Meijer, P.M. (1993) Numerical simulation of RF discharges for plasma processing. Journal of Nuclear Materials, 200 (3). 282-290 doi:10.1016/0022-3115(93)90296-b
In(1993, May) Journal of Nuclear Materials Vol. 200 (3) Elsevier BV

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