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Feoktistov, V.A., Lopaev, D.V., Klopovsky, K.S., Popov, A.M., Popovicheva, O.B., Rakhimov, A.T., Rakhimova, T.V. (1993) Low pressure RF discharge in electronegative gases for plasma processing. Journal of Nuclear Materials, 200 (3). 309-314 doi:10.1016/0022-3115(93)90301-e

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Reference TypeJournal (article/letter/editorial)
TitleLow pressure RF discharge in electronegative gases for plasma processing
JournalJournal of Nuclear Materials
AuthorsFeoktistov, V.A.Author
Lopaev, D.V.Author
Klopovsky, K.S.Author
Popov, A.M.Author
Popovicheva, O.B.Author
Rakhimov, A.T.Author
Rakhimova, T.V.Author
Year1993 (May)Volume200
Issue3
PublisherElsevier BV
DOIdoi:10.1016/0022-3115(93)90301-eSearch in ResearchGate
Generate Citation Formats
Mindat Ref. ID4150488Long-form Identifiermindat:1:5:4150488:6
GUID0
Full ReferenceFeoktistov, V.A., Lopaev, D.V., Klopovsky, K.S., Popov, A.M., Popovicheva, O.B., Rakhimov, A.T., Rakhimova, T.V. (1993) Low pressure RF discharge in electronegative gases for plasma processing. Journal of Nuclear Materials, 200 (3). 309-314 doi:10.1016/0022-3115(93)90301-e
Plain TextFeoktistov, V.A., Lopaev, D.V., Klopovsky, K.S., Popov, A.M., Popovicheva, O.B., Rakhimov, A.T., Rakhimova, T.V. (1993) Low pressure RF discharge in electronegative gases for plasma processing. Journal of Nuclear Materials, 200 (3). 309-314 doi:10.1016/0022-3115(93)90301-e
In(1993, May) Journal of Nuclear Materials Vol. 200 (3) Elsevier BV

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Goedheer, W.J., Meijer, P.M. (1993) Numerical simulation of RF discharges for plasma processing. Journal of Nuclear Materials, 200 (3). 282-290 doi:10.1016/0022-3115(93)90296-b
Klopovsky, K S, Mukhovatova, A V, Popov, A M, Popov, N A, Popovicheva, O B, Rakhimova, T V (1994) Kinetics of metastable states in high-pressure nitrogen plasma pumped by high-current electron beam. Journal of Physics D: Applied Physics, 27. 1399-1405 doi:10.1088/0022-3727/27/7/010
Feoktistov, V A, Mukhovatova, A V, Popov, A M, Rakhimova, T V (1995) Self-consistent modelling of low-pressure RF discharges in oxygen plasma. Journal of Physics D: Applied Physics, 28. 1346-1383 doi:10.1088/0022-3727/28/7/011
Kaltofen, R., Weise, G. (1993) Influence of low-energy bombardment of an RF magnetron sputtering discharge on texture formation and stress in ZnO films. Journal of Nuclear Materials, 200 (3). 375-379 doi:10.1016/0022-3115(93)90312-m
Braginskiy, O V, Vasilieva, A N, Kovalev, A S, Lopaev, D V, Mankelevich, Yu A, Rakhimova, T V, Rakhimov, A T (2005) Singlet oxygen generation in O2flow excited by RF discharge: II. Inhomogeneous discharge mode: plasma jet. Journal of Physics D: Applied Physics, 38. 3626-3634 doi:10.1088/0022-3727/38/19/011
Wilhelm, R. (1993) Characterization of plasma near surfaces. Journal of Nuclear Materials, 200 (3). 273-281 doi:10.1016/0022-3115(93)90295-a
Orchard, J.C., Peacock, A.T., Saibene, G. (1993) JET experience in recovery from large air leak incidents. Journal of Nuclear Materials, 200 (3). 395-399 doi:10.1016/0022-3115(93)90316-q
Höthker, K., Bieger, W., Hartwig, H., Hintz, E., Koizlik, K. (1980) Plasma-induced arcs in an RF-discharge. Journal of Nuclear Materials, 93. 785-790 doi:10.1016/0022-3115(80)90208-1
Escrivão, M.L., Moutinho, A.M.C., Maneira, M.J.P. (1993) Planar magnetron glow discharge on copper — The Thornton relation revisited. Journal of Nuclear Materials, 200 (3). 300-304 doi:10.1016/0022-3115(93)90299-e
Pillai, C.G.S., George, A.M. (1993) Thermal conductivity of uranium dioxide. Journal of Nuclear Materials, 200 (1). 78-81 doi:10.1016/0022-3115(93)90011-m
Kleyn, Aart W. (1993) Preface. Journal of Nuclear Materials, 200 (3). doi:10.1016/0022-3115(93)90294-9
 
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