Reference Type | Journal (article/letter/editorial) |
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Title | Anomalous Sb redistribution during the preparation of delta‐doping layers in silicon |
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Journal | Journal of Applied Physics |
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Authors | Slijkerman, W. F. J. | Author |
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Zagwijn, P. M. | Author |
van der Veen, J. F. | Author |
van de Walle, G. F. A. | Author |
Gravesteijn, D. J. | Author |
Year | 1991 (August 15) | Volume | 70 |
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Issue | 4 |
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Publisher | AIP Publishing |
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DOI | doi:10.1063/1.349447Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 5055246 | Long-form Identifier | mindat:1:5:5055246:9 |
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GUID | 0 |
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Full Reference | Slijkerman, W. F. J., Zagwijn, P. M., van der Veen, J. F., van de Walle, G. F. A., Gravesteijn, D. J. (1991) Anomalous Sb redistribution during the preparation of delta‐doping layers in silicon. Journal of Applied Physics, 70 (4). 2111-2116 doi:10.1063/1.349447 |
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Plain Text | Slijkerman, W. F. J., Zagwijn, P. M., van der Veen, J. F., van de Walle, G. F. A., Gravesteijn, D. J. (1991) Anomalous Sb redistribution during the preparation of delta‐doping layers in silicon. Journal of Applied Physics, 70 (4). 2111-2116 doi:10.1063/1.349447 |
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In | (1991, August) Journal of Applied Physics Vol. 70 (4) AIP Publishing |
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