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Slijkerman, W. F. J., Zagwijn, P. M., van der Veen, J. F., van de Walle, G. F. A., Gravesteijn, D. J. (1991) Anomalous Sb redistribution during the preparation of delta‐doping layers in silicon. Journal of Applied Physics, 70 (4). 2111-2116 doi:10.1063/1.349447

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Reference TypeJournal (article/letter/editorial)
TitleAnomalous Sb redistribution during the preparation of delta‐doping layers in silicon
JournalJournal of Applied Physics
AuthorsSlijkerman, W. F. J.Author
Zagwijn, P. M.Author
van der Veen, J. F.Author
van de Walle, G. F. A.Author
Gravesteijn, D. J.Author
Year1991 (August 15)Volume70
Issue4
PublisherAIP Publishing
DOIdoi:10.1063/1.349447Search in ResearchGate
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Mindat Ref. ID5055246Long-form Identifiermindat:1:5:5055246:9
GUID0
Full ReferenceSlijkerman, W. F. J., Zagwijn, P. M., van der Veen, J. F., van de Walle, G. F. A., Gravesteijn, D. J. (1991) Anomalous Sb redistribution during the preparation of delta‐doping layers in silicon. Journal of Applied Physics, 70 (4). 2111-2116 doi:10.1063/1.349447
Plain TextSlijkerman, W. F. J., Zagwijn, P. M., van der Veen, J. F., van de Walle, G. F. A., Gravesteijn, D. J. (1991) Anomalous Sb redistribution during the preparation of delta‐doping layers in silicon. Journal of Applied Physics, 70 (4). 2111-2116 doi:10.1063/1.349447
In(1991, August) Journal of Applied Physics Vol. 70 (4) AIP Publishing


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