Chavan, S. T., Dhole, S. D., Bhoraskar, V. N., Kanjilal, D., Mehta, G. K. (1997) Depth distribution of silicon-ion induced defects in crystalline silicon. Journal of Applied Physics, 82 (10). 4805-4809 doi:10.1063/1.366339
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Depth distribution of silicon-ion induced defects in crystalline silicon | ||
Journal | Journal of Applied Physics | ||
Authors | Chavan, S. T. | Author | |
Dhole, S. D. | Author | ||
Bhoraskar, V. N. | Author | ||
Kanjilal, D. | Author | ||
Mehta, G. K. | Author | ||
Year | 1997 (November 15) | Volume | 82 |
Issue | 10 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.366339Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5087282 | Long-form Identifier | mindat:1:5:5087282:2 |
GUID | 0 | ||
Full Reference | Chavan, S. T., Dhole, S. D., Bhoraskar, V. N., Kanjilal, D., Mehta, G. K. (1997) Depth distribution of silicon-ion induced defects in crystalline silicon. Journal of Applied Physics, 82 (10). 4805-4809 doi:10.1063/1.366339 | ||
Plain Text | Chavan, S. T., Dhole, S. D., Bhoraskar, V. N., Kanjilal, D., Mehta, G. K. (1997) Depth distribution of silicon-ion induced defects in crystalline silicon. Journal of Applied Physics, 82 (10). 4805-4809 doi:10.1063/1.366339 | ||
In | (1997, November) Journal of Applied Physics Vol. 82 (10) AIP Publishing |
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