Reference Type | Journal (article/letter/editorial) |
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Title | Structural and electrical quality of the high-k dielectric Y2O3 on Si (001): Dependence on growth parameters |
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Journal | Journal of Applied Physics |
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Authors | Dimoulas, A. | Author |
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Vellianitis, G. | Author |
Travlos, A. | Author |
Ioannou-Sougleridis, V. | Author |
Nassiopoulou, A. G. | Author |
Year | 2002 (July) | Volume | 92 |
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Issue | 1 |
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Publisher | AIP Publishing |
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DOI | doi:10.1063/1.1483379Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 5115093 | Long-form Identifier | mindat:1:5:5115093:0 |
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GUID | 0 |
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Full Reference | Dimoulas, A., Vellianitis, G., Travlos, A., Ioannou-Sougleridis, V., Nassiopoulou, A. G. (2002) Structural and electrical quality of the high-k dielectric Y2O3 on Si (001): Dependence on growth parameters. Journal of Applied Physics, 92 (1). 426-431 doi:10.1063/1.1483379 |
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Plain Text | Dimoulas, A., Vellianitis, G., Travlos, A., Ioannou-Sougleridis, V., Nassiopoulou, A. G. (2002) Structural and electrical quality of the high-k dielectric Y2O3 on Si (001): Dependence on growth parameters. Journal of Applied Physics, 92 (1). 426-431 doi:10.1063/1.1483379 |
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In | (2002, July) Journal of Applied Physics Vol. 92 (1) AIP Publishing |
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