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Hwang, Sang-Soo, Jung, Sung-Yup, Joo, Young-Chang (2007) The electric field dependence of Cu migration induced dielectric failure in interlayer dielectric for integrated circuits. Journal of Applied Physics, 101 (7). 74501pp. doi:10.1063/1.2714668

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Reference TypeJournal (article/letter/editorial)
TitleThe electric field dependence of Cu migration induced dielectric failure in interlayer dielectric for integrated circuits
JournalJournal of Applied Physics
AuthorsHwang, Sang-SooAuthor
Jung, Sung-YupAuthor
Joo, Young-ChangAuthor
Year2007 (April)Volume101
Issue7
PublisherAIP Publishing
DOIdoi:10.1063/1.2714668Search in ResearchGate
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Mindat Ref. ID5147966Long-form Identifiermindat:1:5:5147966:8
GUID0
Full ReferenceHwang, Sang-Soo, Jung, Sung-Yup, Joo, Young-Chang (2007) The electric field dependence of Cu migration induced dielectric failure in interlayer dielectric for integrated circuits. Journal of Applied Physics, 101 (7). 74501pp. doi:10.1063/1.2714668
Plain TextHwang, Sang-Soo, Jung, Sung-Yup, Joo, Young-Chang (2007) The electric field dependence of Cu migration induced dielectric failure in interlayer dielectric for integrated circuits. Journal of Applied Physics, 101 (7). 74501pp. doi:10.1063/1.2714668
In(2007, April) Journal of Applied Physics Vol. 101 (7) AIP Publishing

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Hwang, Sang-Soo, Jung, Sung-Yup, Joo, Young-Chang (2008) Characteristics of leakage current in the dielectric layer due to Cu migration during bias temperature stress. Journal of Applied Physics, 104 (4). 44511pp. doi:10.1063/1.2973154
Hwang, Sang-Soo, Lee, Hee-Chan, Ro, Hyun Wook, Yoon, Do Yeung, Joo, Young-Chang (2005) Effect of pore interconnection on Cu-diffusion-induced failures in porous spin-on low-k dielectrics. Applied Physics Letters, 87 (11). 111915pp. doi:10.1063/1.2048822
Paik, Jong-Min, Park, Hyun, Joo, Young-Chang, Park, Ki-Chul (2005) Effect of dielectric materials on stress-induced damage modes in damascene Cu lines. Journal of Applied Physics, 97 (10). 104513pp. doi:10.1063/1.1909283
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Yim, Jung-Ryoul, Jung, Sung-Yup, Yeon, Han-Wool, Kwon, Jang-Yoen, Lee, Young-Joo, Lee, Je-Hun, Joo, Young-Chang (2012) Effects of Metal Electrode on the Electrical Performance of Amorphous In–Ga–Zn–O Thin Film Transistor. Japanese Journal of Applied Physics, 51 (1) 11401 doi:10.7567/jjap.51.011401
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