Eriksson, A. O., Zhirkov, I., Dahlqvist, M., Jensen, J., Hultman, L., Rosen, J. (2013) Characterization of plasma chemistry and ion energy in cathodic arc plasma from Ti-Si cathodes of different compositions. Journal of Applied Physics, 113 (16). 163304pp. doi:10.1063/1.4802433
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Characterization of plasma chemistry and ion energy in cathodic arc plasma from Ti-Si cathodes of different compositions | ||
Journal | Journal of Applied Physics | ||
Authors | Eriksson, A. O. | Author | |
Zhirkov, I. | Author | ||
Dahlqvist, M. | Author | ||
Jensen, J. | Author | ||
Hultman, L. | Author | ||
Rosen, J. | Author | ||
Year | 2013 (April 28) | Volume | 113 |
Issue | 16 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.4802433Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5192181 | Long-form Identifier | mindat:1:5:5192181:5 |
GUID | 0 | ||
Full Reference | Eriksson, A. O., Zhirkov, I., Dahlqvist, M., Jensen, J., Hultman, L., Rosen, J. (2013) Characterization of plasma chemistry and ion energy in cathodic arc plasma from Ti-Si cathodes of different compositions. Journal of Applied Physics, 113 (16). 163304pp. doi:10.1063/1.4802433 | ||
Plain Text | Eriksson, A. O., Zhirkov, I., Dahlqvist, M., Jensen, J., Hultman, L., Rosen, J. (2013) Characterization of plasma chemistry and ion energy in cathodic arc plasma from Ti-Si cathodes of different compositions. Journal of Applied Physics, 113 (16). 163304pp. doi:10.1063/1.4802433 | ||
In | (2013, April) Journal of Applied Physics Vol. 113 (16) AIP Publishing |
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