Sher, Meng-Ju, Mangan, Niall M., Smith, Matthew J., Lin, Yu-Ting, Marbach, Sophie, Schneider, Tobias M., Gradečak, Silvija, Brenner, Michael P., Mazur, Eric (2015) Femtosecond-laser hyperdoping silicon in an SF6 atmosphere: Dopant incorporation mechanism. Journal of Applied Physics, 117 (12). 125301pp. doi:10.1063/1.4914520
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Femtosecond-laser hyperdoping silicon in an SF6 atmosphere: Dopant incorporation mechanism | ||
| Journal | Journal of Applied Physics | ||
| Authors | Sher, Meng-Ju | Author | |
| Mangan, Niall M. | Author | ||
| Smith, Matthew J. | Author | ||
| Lin, Yu-Ting | Author | ||
| Marbach, Sophie | Author | ||
| Schneider, Tobias M. | Author | ||
| Gradečak, Silvija | Author | ||
| Brenner, Michael P. | Author | ||
| Mazur, Eric | Author | ||
| Year | 2015 (March 28) | Volume | 117 |
| Issue | 12 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.4914520Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5200685 | Long-form Identifier | mindat:1:5:5200685:8 |
| GUID | 0 | ||
| Full Reference | Sher, Meng-Ju, Mangan, Niall M., Smith, Matthew J., Lin, Yu-Ting, Marbach, Sophie, Schneider, Tobias M., Gradečak, Silvija, Brenner, Michael P., Mazur, Eric (2015) Femtosecond-laser hyperdoping silicon in an SF6 atmosphere: Dopant incorporation mechanism. Journal of Applied Physics, 117 (12). 125301pp. doi:10.1063/1.4914520 | ||
| Plain Text | Sher, Meng-Ju, Mangan, Niall M., Smith, Matthew J., Lin, Yu-Ting, Marbach, Sophie, Schneider, Tobias M., Gradečak, Silvija, Brenner, Michael P., Mazur, Eric (2015) Femtosecond-laser hyperdoping silicon in an SF6 atmosphere: Dopant incorporation mechanism. Journal of Applied Physics, 117 (12). 125301pp. doi:10.1063/1.4914520 | ||
| In | (2015, March) Journal of Applied Physics Vol. 117 (12) AIP Publishing | ||
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